Atomic Layer Deposition-based Tuning of the Pore Size in Mesoporous Thin Films Studied by In Situ Grazing Incidence Small Angle X-ray Scattering
- Research Organization:
- Brookhaven National Lab. (BNL), Upton, NY (United States)
- Sponsoring Organization:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- DOE Contract Number:
- SC00112704
- OSTI ID:
- 1228928
- Report Number(s):
- BNL-111003-2015-JA
- Journal Information:
- Nanoscale, Vol. 6, Issue 24; ISSN 2040-3364
- Publisher:
- Royal Society of Chemistry
- Country of Publication:
- United States
- Language:
- English
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