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Title: Heterogeneous microring and Mach-Zehnder modulators based on lithium niobate and chalcogenide glasses on silicon

In this study, thin films of lithium niobate are wafer bonded onto silicon substrates and rib-loaded with a chalcogenide glass, Ge23Sb7S70, to demonstrate strongly confined single-mode submicron waveguides, microring modulators, and Mach-Zehnder modulators in the telecom C band. The 200 μm radii microring modulators present 1.2 dB/cm waveguide propagation loss, 1.2 × 105 quality factor, 0.4 GHz/V tuning rate, and 13 dB extinction ratio. The 6 mm long Mach-Zehnder modulators have a half-wave voltage-length product of 3.8 and an extinction ratio of 15 dB. The demonstrated work is a key step towards enabling wafer scale dense on-chip integration of high performance lithium niobate electro-optical devices on silicon for short reach optical interconnects and higher order advanced modulation schemes.
 [1] ;  [2] ;  [1] ;  [1] ;  [3] ;  [3] ;  [2] ;  [1]
  1. Univ. of Central Florida, Orlando, FL (United States)
  2. Partow Technologies LLC, Orlando, FL (United States)
  3. Univ. of Central Florida, Orlando, FL (United States); Clemson Univ., Clemson, SC (United States)
Publication Date:
OSTI Identifier:
Grant/Contract Number:
Accepted Manuscript
Journal Name:
Optics Express
Additional Journal Information:
Journal Volume: 23; Journal Issue: 17; Journal ID: ISSN 1094-4087
Optical Society of America (OSA)
Research Org:
Partow Technologies LLC, Orlando, FL (United States)
Sponsoring Org:
USDOE Office of Science (SC)
Country of Publication:
United States
42 ENGINEERING integrated optics; modulators; lithium niobate; optoelectronics; integrated optoelectronic circuits