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Title: Surface-texture evolution of different chemical-vapor-deposited zinc sulfide flats polished with various magnetorheological fluids

Abstract

The macro-structure of chemical-vapor-deposited (CVD) zinc sulfide (ZnS) substrates is characterizedby cone-like structures that start growing at the early stages of deposition. As deposition progresses,these cones grow larger and reach centimeter size in height and millimeter size in width. It is challengingto polish out these features from the top layer, particularly for the magnetorheological finishing (MRF)process. A conventional MR fluid tends to leave submillimeter surface artifacts on the finished surface,which is a direct result of the cone-like structure. Here we describe the MRF process of polishing four CVD ZnS substrates, manufactured by four differentvendors, with conventional MR fluid at pH 10 and zirconia-coated-CI (carbonyl iron) MR fluids at pH 4, 5,and 6. We report on the surface–texture evolution of the substrates as they were MRF polished with thedifferent fluids. We show that performances of the zirconia-coated-CI MR fluid at pH 4 are significantlyhigher than that of the same fluid at pH levels of 5 and 6 and moderately higher than that of a conventionalMR fluid at pH 10. An improvement in surface–texture variability from part to part was also observedwith the pH 4 MR fluid.

Authors:
 [1];  [1];  [1];  [1]
  1. Univ. of Rochester, NY (United States). Lab. for Laser Energetics
Publication Date:
Research Org.:
Laboratory for Laser Energetics, University of Rochester, Rochester, NY (United States)
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA)
OSTI Identifier:
1223344
Alternate Identifier(s):
OSTI ID: 1556186
Grant/Contract Number:  
NA0001944
Resource Type:
Journal Article: Accepted Manuscript
Journal Name:
Precision Engineering
Additional Journal Information:
Journal Volume: 43; Journal Issue: 2016; Journal ID: ISSN 0141-6359
Country of Publication:
United States
Language:
English
Subject:
MRF; CVD ZnS; polishing; pebbles; surface artifacts

Citation Formats

Salzman, S., Romanofsky, H. J., Jacobs, S. D., and Lambropoulos, J. C. Surface-texture evolution of different chemical-vapor-deposited zinc sulfide flats polished with various magnetorheological fluids. United States: N. p., 2015. Web. doi:10.1016/j.precisioneng.2015.07.011.
Salzman, S., Romanofsky, H. J., Jacobs, S. D., & Lambropoulos, J. C. Surface-texture evolution of different chemical-vapor-deposited zinc sulfide flats polished with various magnetorheological fluids. United States. https://doi.org/10.1016/j.precisioneng.2015.07.011
Salzman, S., Romanofsky, H. J., Jacobs, S. D., and Lambropoulos, J. C. 2015. "Surface-texture evolution of different chemical-vapor-deposited zinc sulfide flats polished with various magnetorheological fluids". United States. https://doi.org/10.1016/j.precisioneng.2015.07.011. https://www.osti.gov/servlets/purl/1223344.
@article{osti_1223344,
title = {Surface-texture evolution of different chemical-vapor-deposited zinc sulfide flats polished with various magnetorheological fluids},
author = {Salzman, S. and Romanofsky, H. J. and Jacobs, S. D. and Lambropoulos, J. C.},
abstractNote = {The macro-structure of chemical-vapor-deposited (CVD) zinc sulfide (ZnS) substrates is characterizedby cone-like structures that start growing at the early stages of deposition. As deposition progresses,these cones grow larger and reach centimeter size in height and millimeter size in width. It is challengingto polish out these features from the top layer, particularly for the magnetorheological finishing (MRF)process. A conventional MR fluid tends to leave submillimeter surface artifacts on the finished surface,which is a direct result of the cone-like structure. Here we describe the MRF process of polishing four CVD ZnS substrates, manufactured by four differentvendors, with conventional MR fluid at pH 10 and zirconia-coated-CI (carbonyl iron) MR fluids at pH 4, 5,and 6. We report on the surface–texture evolution of the substrates as they were MRF polished with thedifferent fluids. We show that performances of the zirconia-coated-CI MR fluid at pH 4 are significantlyhigher than that of the same fluid at pH levels of 5 and 6 and moderately higher than that of a conventionalMR fluid at pH 10. An improvement in surface–texture variability from part to part was also observedwith the pH 4 MR fluid.},
doi = {10.1016/j.precisioneng.2015.07.011},
url = {https://www.osti.gov/biblio/1223344}, journal = {Precision Engineering},
issn = {0141-6359},
number = 2016,
volume = 43,
place = {United States},
year = {Wed Aug 19 00:00:00 EDT 2015},
month = {Wed Aug 19 00:00:00 EDT 2015}
}

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Cited by: 8 works
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Works referenced in this record:

Minimizing artifact formation in magnetorheological finishing of chemical vapor deposition ZnS flats
journal, January 2005


Microstructure and Texture of Polycrystalline CVD-ZnS Analyzed via EBSD
journal, July 2012


Monolithic material fabrication by chemical vapour deposition
journal, December 1988


Zirconia-coated carbonyl-iron-particle-based magnetorheological fluid for polishing optical glasses and ceramics
journal, January 2009


Synthesis and corrosion study of zirconia-coated carbonyl iron particles
journal, February 2010


Works referencing / citing this record:

Experimental study on chemical mechanical polishing of chalcogenide glasses
journal, January 2019