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Title: Studies of the Origins of Half-Loop Arrays and Interfacial Dislocations Observed in Homoepitaxial Layers of 4H-SiC

Journal Article · · Journal of Electronic Materials

Research Organization:
Argonne National Lab. (ANL), Argonne, IL (United States). Advanced Photon Source (APS)
Sponsoring Organization:
INDUSTRY
OSTI ID:
1212214
Journal Information:
Journal of Electronic Materials, Vol. 44, Issue 5; ISSN 0361-5235
Publisher:
Springer
Country of Publication:
United States
Language:
ENGLISH

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