Numerical Modeling of an RF Argon–Silane Plasma with Dust Particle Nucleation and Growth
Journal Article
·
· Plasma Chemistry and Plasma Processing
- Sponsoring Organization:
- USDOE Office of Science (SC), Fusion Energy Sciences (FES)
- OSTI ID:
- 1211648
- Journal Information:
- Plasma Chemistry and Plasma Processing, Vol. 34, Issue 3; ISSN 0272-4324
- Country of Publication:
- United States
- Language:
- English
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