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Title: Electron nanoprobe induced oxidation: A simulation of direct-write purification

Journal Article · · Physical Chemistry Chemical Physics. PCCP
DOI:https://doi.org/10.1039/C5CP01196E· OSTI ID:1209204
 [1];  [2];  [3];  [1];  [3];  [4];  [5]
  1. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States); Univ. of Tennessee, Knoxville, TN (United States)
  2. Graz Centre for Electron Microscopy, Graz (Austria)
  3. Univ. of Tennessee, Knoxville, TN (United States)
  4. Graz Centre for Electron Microscopy. Graz (Austria)
  5. Graz Centre for Electron Microscopy. Graz (Austria); Univ. of Technology, Graz (Austria)
+ Show Author Affiliations

Electron beam direct-write has recently taken a large step forward with the advent of methods to purify deposits. This development has opened the door for future direct-write device prototyping and editing. In one such approach, an additional beam scanning procedure removes carbonaceous impurities via oxidation from metal–carbon deposits (e.g., PtC5) in the presence of H2O or O2 after deposition. So far, critical aspects of the oxidation reaction remain unclear; experiments reveal clearly that electron stimulated oxidation drives the process yet it is not understood why H2O purifies by a bottom-up mechanism while O2 purifies from the top-down. The simulation results presented here suggest that the chemisorption of dissolved O2 at buried Pt nanoparticle surfaces controls purification in the top-down case while both the high relative solubility coupled with weak physisorption of H2O explains the bottom-up process. Crucial too is the role that the carbonaceous contaminant itself has on the dissolution and diffusion of O2 and H2O. The results pave the way for simulation driven experiments where (1) the transient densification of the deposit can be accounted for in the initial deposit design stage and (2) the deposition and purification steps can be combined.

Research Organization:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
Sponsoring Organization:
USDOE Office of Science (SC)
Grant/Contract Number:
AC05-00OR22725
OSTI ID:
1209204
Journal Information:
Physical Chemistry Chemical Physics. PCCP, Vol. 17, Issue 28; ISSN 1463-9076
Publisher:
Royal Society of ChemistryCopyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 19 works
Citation information provided by
Web of Science

References (39)

Gas-assisted focused electron beam and ion beam processing and fabrication
  • Utke, Ivo; Hoffmann, Patrik; Melngailis, John
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 26, Issue 4 https://doi.org/10.1116/1.2955728
journal January 2008
Electron-Beam-Induced Deposition of Platinum from a Liquid Precursor journal July 2009
Focused-electron-beam-induced processing (FEBIP) for emerging applications in carbon nanoelectronics journal July 2014
Understanding the electron-stimulated surface reactions of organometallic complexes to enable design of precursors for electron beam-induced deposition journal July 2014
Electron Induced Surface Reactions of the Organometallic Precursor Trimethyl(methylcyclopentadienyl)platinum(IV) journal January 2009
Role of Activated Chemisorption in Gas-Mediated Electron Beam Induced Deposition journal October 2012
Creating pure nanostructures from electron-beam-induced deposition using purification techniques: a technology perspective journal August 2009
Electron beam deposition for nanofabrication: Insights from surface science journal February 2011
Purification of platinum and gold structures after electron-beam-induced deposition journal July 2006
A new sequential EBID process for the creation of pure Pt structures from MeCpPtMe 3 journal March 2013
Single-crystal nanowires grown via electron-beam-induced deposition journal July 2008
Atomic radical abatement of organic impurities from electron beam deposited metallic structures
  • Wnuk, Joshua D.; Gorham, Justin M.; Rosenberg, Samantha G.
  • Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 28, Issue 3 https://doi.org/10.1116/1.3378142
journal May 2010
Enhanced by-product desorption via laser assisted electron beam induced deposition of W(CO) 6 with improved conductivity and resolution journal September 2013
Rapid and Highly Compact Purification for Focused Electron Beam Induced Deposits: A Low Temperature Approach Using Electron Stimulated H 2 O Reactions journal June 2014
Electron-Beam-Assisted Oxygen Purification at Low Temperatures for Electron-Beam-Induced Pt Deposits: Towards Pure and High-Fidelity Nanostructures journal December 2013
Advances in gas-mediated electron beam-induced etching and related material processing techniques journal July 2014
A nanoscale three-dimensional Monte Carlo simulation of electron-beam-induced deposition with gas dynamics journal June 2007
Catalytic Purification of Directly Written Nanostructured Pt Microelectrodes journal September 2014
AlGaInN metal-organic-chemical-vapor-deposition gas-phase chemistry in hydrogen and nitrogen diluents: First-principles calculations journal November 2006
Electron-stimulated purification of platinum nanostructures grown via focused electron beam induced deposition journal January 2015
Optimization of postgrowth electron-beam curing for focused electron-beam-induced Pt deposits
  • Plank, Harald; Kothleitner, Gerald; Hofer, Ferdinand
  • Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 29, Issue 5 https://doi.org/10.1116/1.3622314
journal September 2011
Chemical tuning of PtC nanostructures fabricated via focused electron beam induced deposition journal April 2013
TEM study of annealed Pt nanostructures grown by electron beam-induced deposition journal March 2007
Energetics of Oxygen Adatoms, Hydroxyl Species and Water Dissociation on Pt(111) journal November 2012
Adsorption trends for water, hydroxyl, oxygen, and hydrogen on transition-metal and platinum-skin surfaces journal October 2006
Water adsorption on metal surfaces: A general picture from density functional theory studies journal May 2004
Atomic Layer Deposition of Platinum Thin Films journal May 2003
Adsorption of oxygen on Pt(111) and its reactivity to hydrogen and carbon monoxide journal October 1980
A molecular beam study of the adsorption and desorption of oxygen from a Pt(111) surface journal May 1981
Platinum Film Growth by Chemical Vapor Deposition Based on Autocatalytic Oxidative Decomposition journal January 2001
Spatial chemistry evolution during focused electron beam-induced deposition: origins and workarounds journal May 2014
Air-stable magnesium nanocomposites provide rapid and high-capacity hydrogen storage without using heavy-metal catalysts journal March 2011
Materials Science of Membranes for Gas and Vapor Separation book June 2006
Cross Sections for Electron Collisions with Water Molecules journal March 2005
Solution of Gases in Polyethylene Terephthalate journal January 1963
Unified Dual Mode Description of Small Molecule Sorption and Desorption Kinetics in a Glassy Polymer journal August 2009
Dissociation of oxygen admolecules on platinum (110)(1 × 2) reconstructed surfaces at low temperatures journal January 1991
Purification of Nanoscale Electron-Beam-Induced Platinum Deposits via a Pulsed Laser-Induced Oxidation Reaction journal November 2014
A molecular beam study of the adsorption and desorption of oxygen from a Pt(111) surface journal May 1981

Cited By (5)

Tunable 3D Nanoresonators for Gas‐Sensing Applications journal March 2018
Direct-write nanoscale printing of nanogranular tunnelling strain sensors for sub-micrometre cantilevers journal September 2016
Plasmonic gold helices for the visible range fabricated by oxygen plasma purification of electron beam induced deposits journal December 2016
Direct writing of gold nanostructures with an electron beam: On the way to pure nanostructures by combining optimized deposition with oxygen-plasma treatment journal January 2017
Plasmonic Gold Helices for the visible range fabricated by oxygen plasma purification of electron beam induced deposits text January 2016

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