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Title: Order within disorder: The atomic structure of ion-beam sputtered amorphous tantala (a-Ta₂O₅)

Journal Article · · APL Materials
DOI:https://doi.org/10.1063/1.4913586· OSTI ID:1202306
 [1];  [1];  [2];  [1];  [3];  [4];  [5];  [1];  [2];  [6];  [6];  [6];  [1];  [6];  [3];  [1]
  1. Stanford Univ., CA (United States). E.L. Ginzton Lab.
  2. California Inst. of Technology (CalTech), Pasadena, CA (United States). LIGO Lab.
  3. Stanford Univ., Stanford, CA (United States). Dept. of Geological and Environmental Sciences
  4. SLAC National Accelerator Lab., Menlo Park, CA (United States). Stanford Synchrotron Radiation Lightsource (SSRL)
  5. SLAC National Accelerator Lab., Menlo Park, CA (United States)
  6. Univ. of Glasgow (United Kingdom), School of Physics and Astronomy, SUPA
+ Show Author Affiliations

Amorphous tantala (a-Ta₂O₅) is a technologically important material often used in high-performance coatings. Understanding this material at the atomic level provides a way to further improve performance. This work details extended X-ray absorption fine structure measurements of a-Ta₂O₅ coatings, where high-quality experimental data and theoretical fits have allowed a detailed interpretation of the nearest-neighbor distributions. It was found that the tantalum atom is surrounded by four shells of atoms in sequence; oxygen, tantalum, oxygen, and tantalum. A discussion is also included on how these models can be interpreted within the context of published crystalline Ta₂O₅ and other a-T₂O₅ studies.

Research Organization:
SLAC National Accelerator Lab., Menlo Park, CA (United States)
Sponsoring Organization:
USDOE
Grant/Contract Number:
PHYS1068596
OSTI ID:
1202306
Journal Information:
APL Materials, Vol. 3, Issue 3; ISSN 2166-532X
Publisher:
American Institute of Physics (AIP)Copyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 16 works
Citation information provided by
Web of Science

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Cited By (3)

Numerical study of the structural and vibrational properties of amorphous Ta 2 O 5 and TiO 2 -doped Ta 2 O 5 journal May 2016
Correlation between the transport mechanisms in conductive filaments inside Ta 2 O 5 -based resistive switching devices and in substoichiometric TaO x thin films journal May 2018
Investigation of effects of assisted ion bombardment on mechanical loss of sputtered tantala thin films for gravitational wave interferometers journal December 2019

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Related Subjects

36 MATERIALS SCIENCE
extended x-ray absorption fine structure spectroscopy
tantalum
crystal structure
shell model
materials properties