A brief review of atomic layer deposition: from fundamentals to applications
Journal Article
·
· Materials Today
- Sponsoring Organization:
- USDOE
- OSTI ID:
- 1197715
- Journal Information:
- Materials Today, Journal Name: Materials Today Vol. 17 Journal Issue: 5; ISSN 1369-7021
- Publisher:
- ElsevierCopyright Statement
- Country of Publication:
- United Kingdom
- Language:
- English
Cited by: 1030 works
Citation information provided by
Web of Science
Web of Science
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