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Title: Catalyst Design with Atomic Layer Deposition

Journal Article · · ACS Catalysis
DOI:https://doi.org/10.1021/cs501862h· OSTI ID:1172068

Atomic layer deposition (ALD) has emerged as an interesting tool for the atomically precise design and synthesis of catalytic materials. Herein, we discuss examples in which the atomic precision has been used to elucidate reaction mechanisms and catalyst structure-property relationships by creating materials with a controlled distribution of size, composition, and active site. We highlight ways ALD has been utilized to design catalysts with improved activity, selectivity, and stability under a variety of conditions (e.g., high temperature, gas and liquid phase, and corrosive environments). In addition, due to the flexibility and control of structure and composition, ALD can create myriad catalytic structures (e.g., high surface area oxides, metal nanoparticles, bimetallic nanoparticles, bifunctional catalysts, controlled microenvironments, etc.) that consequently possess applicability for a wide range of chemical reactions (e.g., CO2 conversion, electrocatalysis, photocatalytic and thermal water splitting, methane conversion, ethane and propane dehydrogenation, and biomass conversion). Lastly, the outlook for ALD-derived catalytic materials is discussed, with emphasis on the pending challenges as well as areas of significant potential for building scientific insight and achieving practical impacts.

Research Organization:
Argonne National Laboratory (ANL), Argonne, IL (United States)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
Grant/Contract Number:
AC02-06CH11357
OSTI ID:
1172068
Alternate ID(s):
OSTI ID: 1239587
Journal Information:
ACS Catalysis, Journal Name: ACS Catalysis Vol. 5 Journal Issue: 3; ISSN 2155-5435
Publisher:
American Chemical SocietyCopyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 542 works
Citation information provided by
Web of Science

References (235)

Direct-Write Atomic Layer Deposition of High-Quality Pt Nanostructures: Selective Growth Conditions and Seed Layer Requirements journal May 2013
FT-IR in the Quantitative Analysis of Gaseous Hydrocarbon Mixtures journal June 1995
Atomic layer deposition on particles using a fluidized bed reactor with in situ mass spectrometry journal September 2007
Thermally stable Pt/mesoporous silica core–shell nanocatalysts for high-temperature reactions journal November 2008
Atomic Layer Epitaxy Growth of TiN Thin Films journal January 1995
Preparation of Ni/Al2O3 catalysts from vapor phase by atomic layer epitaxy journal January 1994
Correction to “Conformal Organic-Inorganic Hybrid Network Polymer Thin Films by Molecular Layer Deposition using Trimethylaluminum and Glycidol” journal September 2011
Atomic layer deposition of ultrathin and conformal Al2O3 films on BN particles journal August 2000
A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects journal December 2012
The fabrication of “high-technology” catalysts journal January 1994
Oxidative Dehydrogenation of Cyclohexane on Cobalt Oxide (Co 3 O 4 ) Nanoparticles: The Effect of Particle Size on Activity and Selectivity journal September 2012
Ruthenium/aerogel nanocomposites via atomic layer deposition journal January 2007
Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process journal June 2005
Amorphous TiO2 coatings stabilize Si, GaAs, and GaP photoanodes for efficient water oxidation journal May 2014
Atomic Layer Deposition of CuxS for Solar Energy Conversion journal January 2003
Synthesis and Stabilization of Supported Metal Catalysts by Atomic Layer Deposition journal March 2013
Bridging the Chemical and Biological Catalysis Gap: Challenges and Outlooks for Producing Sustainable Chemicals journal April 2014
Atomic layer deposition of noble metals: Exploration of the low limit of the deposition temperature journal November 2004
Catalytic nanoliths journal February 2009
Kinetics and mechanism of solar-thermochemical H2 production by oxidation of a cobalt ferrite–zirconia composite journal January 2013
History of atomic layer deposition and its relationship with the American Vacuum Society
  • Parsons, Gregory N.; Elam, Jeffrey W.; George, Steven M.
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 31, Issue 5 https://doi.org/10.1116/1.4816548
journal September 2013
Mechanism of Self-catalytic Atomic Layer Deposition of Silicon Dioxide Using 3-Aminopropyl Triethoxysilane, Water, and Ozone journal May 2011
In Situ Quadrupole Mass Spectrometry and Quartz Crystal Microbalance Studies on the Atomic Layer Deposition of Titanium Dioxide from Titanium Tetrachloride and Water journal November 2001
Enhanced stability of cobalt catalysts by atomic layer deposition for aqueous-phase reactions journal January 2014
Stabilizing Ni Catalysts by Molecular Layer Deposition for Harsh, Dry Reforming Conditions journal July 2014
Anisotropic Atomic Layer Deposition Profiles of TiO 2 in Hierarchical Silica Material with Multiple Porosity journal July 2012
Atomic layer deposited highly dispersed platinum nanoparticles supported on non-functionalized multiwalled carbon nanotubes for the hydrogenation of xylose to xylitol journal August 2013
Reactor concepts for atomic layer deposition on agitated particles: A review
  • Longrie, Delphine; Deduytsche, Davy; Detavernier, Christophe
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 32, Issue 1, Article No. 010802 https://doi.org/10.1116/1.4851676
journal January 2014
Stabilization of Copper Catalysts for Liquid-Phase Reactions by Atomic Layer Deposition journal November 2013
Beta Zeolite-Supported Iridium Catalysts by Gas Phase Deposition journal June 2009
Improvement in Al2O3 dielectric behavior by using ozone as an oxidant for the atomic layer deposition technique journal December 2002
Atomic layer deposition of palladium films on Al2O3 surfaces journal December 2006
Sequential surface chemical reaction limited growth of high quality Al 2 O 3 dielectrics journal November 1989
Amine Catalyzed Atomic Layer Deposition of (3-Mercaptopropyl)trimethoxysilane for the Production of Heterogeneous Sulfonic Acid Catalysts journal September 2013
Control of Thickness and Chemical Properties of Atomic Layer Deposition Overcoats for Stabilizing Cu/γ-Al 2 O 3 Catalysts journal September 2014
Metalcones: Hybrid Organic–Inorganic Films Fabricated Using Atomic and Molecular Layer Deposition Techniques journal September 2011
Selective-area atomic layer epitaxy growth of ZnO features on soft lithography-patterned substrates journal September 2001
ALD of Hafnium Oxide Thin Films from Tetrakis(ethylmethylamino)hafnium and Ozone journal January 2005
Surface Chemistry in the Atomic Layer Deposition of TiN Films from TiCl 4 and Ammonia journal July 2006
Surface Characteristics and Activity of Chromia/Alumina Catalysts Prepared by Atomic Layer Epitaxy journal September 1996
Influence of the Metal Oxide Substrate Structure on Vanadium Oxide Monomer Formation journal October 2013
An autonomous photosynthetic device in which all charge carriers derive from surface plasmons journal February 2013
Spatial atomic layer deposition: A route towards further industrialization of atomic layer deposition
  • Poodt, Paul; Cameron, David C.; Dickey, Eric
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 30, Issue 1, Article No. 010802 https://doi.org/10.1116/1.3670745
journal January 2012
Supported Ru−Pt Bimetallic Nanoparticle Catalysts Prepared by Atomic Layer Deposition journal August 2010
Atomic layer deposition of SiO2 at room temperature using NH3-catalyzed sequential surface reactions journal February 2000
Enhanced Water Splitting Efficiency Through Selective Surface State Removal journal April 2014
Magnesium aluminate thin films by atomic layer deposition from organometallic precursors and water journal November 2004
The effect of iridium precursor on oxide-supported iridium catalysts prepared by atomic layer deposition journal February 2011
Porous Alumina Protective Coatings on Palladium Nanoparticles by Self-Poisoned Atomic Layer Deposition journal May 2012
Synthesis of Highly Ordered Hydrothermally Stable Mesoporous Niobia Catalysts by Atomic Layer Deposition journal August 2011
Aggregation behavior of nanoparticles in fluidized beds journal December 2005
Fluidization of nanopowders: a review journal February 2012
An overview of hydrogen production technologies journal January 2009
Etheric C–O Bond Hydrogenolysis Using a Tandem Lanthanide Triflate/Supported Palladium Nanoparticle Catalyst System journal August 2012
Efficient Generation of H2 by Splitting Water with an Isothermal Redox Cycle journal August 2013
Selective atomic layer deposition of zirconia on copper patterned silicon substrates using ethanol as oxygen source as well as copper reductant
  • Kannan Selvaraj, Sathees; Parulekar, Jaya; Takoudis, Christos G.
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 32, Issue 1 https://doi.org/10.1116/1.4826941
journal January 2014
Preparation Methods for Multi-Walled Carbon Nanotube Supported Palladium Catalysts journal September 2012
Atomic layer deposition of tungsten disulphide solid lubricant thin films journal December 2004
Surface characteristics and activity in selective oxidation of -xylene of supported VO catalysts prepared by standard impregnation and atomic layer deposition journal October 2004
Enhancing the stability of copper chromite catalysts for the selective hydrogenation of furfural using ALD overcoating journal August 2014
Shape-selective sieving layers on an oxide catalyst surface journal October 2012
Role of NH3 feeding period to realize high-quality nickel films by hot-wire-assisted atomic layer deposition journal May 2014
Enhanced Stability of LiCoO2 Cathodes in Lithium-Ion Batteries Using Surface Modification by Atomic Layer Deposition journal January 2010
Preparation, characterization and activity testing of vanadia catalysts deposited onto silica and alumina supports by atomic layer deposition journal March 2002
Mechanism, Products, and Growth Rate of Atomic Layer Deposition of Noble Metals journal May 2010
Genesis and Evolution of Surface Species during Pt Atomic Layer Deposition on Oxide Supports Characterized by in Situ XAFS Analysis and Water−Gas Shift Reaction journal May 2010
Functionalization of fine particles using atomic and molecular layer deposition journal May 2012
Synthesis of oxide thin films and overlayers by atomic layer epitaxy for advanced applications journal October 1996
Growth of aluminium nitride on porous silica by atomic layer chemical vapour deposition journal September 2000
Epitaxial TiO2/SnO2 core–shell heterostructure by atomic layer deposition journal January 2012
Coating Fine Nickel Particles with Al 2 O 3 Utilizing an Atomic Layer Deposition-Fluidized Bed Reactor (ALD-FBR) journal April 2004
Surface Modification of Au/TiO 2 Catalysts by SiO 2 via Atomic Layer Deposition journal May 2008
Supported Core/Shell Bimetallic Nanoparticles Synthesis by Atomic Layer Deposition journal August 2012
XXV. Zur Frage der Geschwindigkeit des Wachsthums und der Auflösung der Krystallflächen journal January 1901
Nanocoating individual cohesive boron nitride particles in a fluidized bed by ALD journal April 2004
Hot-wire-assisted atomic layer deposition of a high quality cobalt film using cobaltocene: Elementary reaction analysis on NH x radical formation
  • Shimizu, Hideharu; Sakoda, Kaoru; Momose, Takeshi
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 30, Issue 1 https://doi.org/10.1116/1.3666034
journal January 2012
Influence of substrate temperature on atomic layer growth and properties of HfO2 thin films journal February 1999
Al 2 O 3 Atomic Layer Deposition with Trimethylaluminum and Ozone Studied by in Situ Transmission FTIR Spectroscopy and Quadrupole Mass Spectrometry journal November 2008
Investigation on the Growth Initiation of Ru Thin Films by Atomic Layer Deposition journal May 2010
Nucleation and Growth of Silver Nanoparticles by AB and ABC-Type Atomic Layer Deposition journal July 2014
Formation of Hollow Nanocrystals Through the Nanoscale Kirkendall Effect journal April 2004
Conformal ZnO coatings on high surface area silica gel using atomic layer deposition journal July 2008
Synthesis of uniformly dispersed anatase nanoparticles inside mesoporous silica thin films via controlled breakup and crystallization of amorphous TiO2 deposited using atomic layer deposition journal January 2013
Atomic Layer Deposition of Aluminum Oxide in Mesoporous Silica Gel journal September 2010
Chemical Vapor Deposition Methods for the Controlled Preparation of Supported Catalytic Materials journal September 2002
Rapid Silica Atomic Layer Deposition on Large Quantities of Cohesive Nanoparticles journal July 2010
Enhancing Water Splitting Activity and Chemical Stability of Zinc Oxide Nanowire Photoanodes with Ultrathin Titania Shells journal June 2013
Barrier properties of polymer/alumina nanocomposite membranes fabricated by atomic layer deposition journal September 2008
Stabilizing Nanostructured Solid Oxide Fuel Cell Cathode with Atomic Layer Deposition journal August 2013
The Active Site of Methanol Synthesis over Cu/ZnO/Al2O3 Industrial Catalysts journal April 2012
Oxidative dehydrogenation of cyclohexane over alumina-supported vanadium oxide nanoliths journal February 2010
Ultralow Loading Pt Nanocatalysts Prepared by Atomic Layer Deposition on Carbon Aerogels journal August 2008
Energy-enhanced atomic layer deposition for more process and precursor versatility journal December 2013
Carbon dioxide reforming of methane over mesoporous Ni/SiO2 journal October 2013
Field Effects in Plasmonic Photocatalyst by Precise SiO 2 Thickness Control Using Atomic Layer Deposition journal February 2011
Adsorption controlled preparation of heterogeneous catalysts book January 1999
Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends journal January 2013
Ultra-thin microporous–mesoporous metal oxide films prepared by molecular layer deposition (MLD) journal January 2009
An Investigation of Oxygen Reduction Kinetics in LSF Electrodes journal December 2012
Catalytic hydrogen transfer of ketones over atomic layer deposited highly-dispersed platinum nanoparticles supported on multi-walled carbon nanotubes journal February 2014
Rapid SiO 2 Atomic Layer Deposition Using Tris( tert -pentoxy)silanol journal October 2008
Pore Structure and Bifunctional Catalyst Activity of Overlayers Applied by Atomic Layer Deposition on Copper Nanoparticles journal April 2014
IR and 1 H NMR studies on the adsorption of gaseous hydrogen chloride on γ-alumina journal January 1995
Equilibrium shape of a small particle in contact with a foreign substrate journal February 1967
Molecular Layer Deposition of Titanicone Films using TiCl 4 and Ethylene Glycol or Glycerol: Growth and Properties journal July 2012
Self-Limited Reaction-Diffusion in Nanostructured Substrates: Surface Coverage Dynamics and Analytic Approximations to ALD Saturation Times journal March 2012
Quantum size effects in TiO 2 thin films grown by atomic layer deposition journal January 2014
Molybdenum Atomic Layer Deposition Using MoF 6 and Si 2 H 6 as the Reactants journal April 2011
Comparison between ZnO films grown by atomic layer deposition using H2O or O3 as oxidant journal May 2005
Mechanism of Pyridine-Catalyzed SiO 2 Atomic Layer Deposition Studied by Fourier Transform Infrared Spectroscopy journal January 2007
Atomic layer deposition fabricated substoichiometric TiO x nanorods as fuel cell catalyst supports
  • Phillips, Richard; Hansen, Paul; Eisenbraun, Eric
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 30, Issue 1 https://doi.org/10.1116/1.3664111
journal January 2012
Atomic Layer Deposition of Zirconium Titanium Oxide from Titanium Isopropoxide and Zirconium Chloride journal May 2001
Effect of Atomic Layer Deposition Coatings on the Surface Structure of Anodic Aluminum Oxide Membranes journal July 2005
Synthesis-Dependent First-Order Raman Scattering in SrTiO 3 Nanocubes at Room Temperature journal September 2008
Area selective atomic layer deposition of titanium dioxide: Effect of precursor chemistry
  • Sinha, Ashwini; Hess, Dennis W.; Henderson, Clifford L.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 24, Issue 6 https://doi.org/10.1116/1.2359728
journal January 2006
Butanol Dehydration over V2O5-TiO2/MCM-41 Catalysts Prepared via Liquid Phase Atomic Layer Deposition journal April 2013
Hydrogen Production via Chemical Looping Redox Cycles Using Atomic Layer Deposition-Synthesized Iron Oxide and Cobalt Ferrites journal April 2011
Atomic layer deposition of platinum clusters on titania nanoparticles at atmospheric pressure journal January 2013
Propane Oxidation over Pt/SrTiO 3 Nanocuboids journal May 2011
Engineered High Aspect Ratio Vertical Nanotubes as a Model System for the Investigation of Catalytic Methanol Synthesis Over Cu/ZnO journal January 2014
A Kinetic Model for Step Coverage by Atomic Layer Deposition in Narrow Holes or Trenches journal March 2003
Surface chemistry of materials deposition at atomic layer level journal July 1996
Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges
  • Profijt, H. B.; Potts, S. E.; van de Sanden, M. C. M.
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 29, Issue 5 https://doi.org/10.1116/1.3609974
journal September 2011
A spinel ferrite/hercynite water-splitting redox cycle journal April 2010
Supported iridium catalysts prepared by atomic layer deposition: effect of reduction and calcination on activity in toluene hydrogenation journal March 2007
Subnanometer Palladium Particles Synthesized by Atomic Layer Deposition journal May 2011
Atomic Layer Deposition of Titanium and Vanadium Oxide on Mesoporous Silica and Phenol/Formaldehyde Resins - the Effect of the Support on the Liquid Phase Epoxidation of Cyclohexene journal December 2011
Operando X-ray Absorption Spectroscopy Studies of Sintering for Supported Copper Catalysts during Liquid-phase Reaction journal July 2014
Stereoselective Transformations of α-Trifluoromethylated Ketoximes to Optically Active Amines by Enzyme-Nanometal Cocatalysis: Synthesis of ( S )-Inhibitor of Phenylethanolamine N-Methyltransferase journal May 2014
Modulation of the Growth Per Cycle in Atomic Layer Deposition Using Reversible Surface Functionalization journal December 2013
Fabrication and Formation Mechanism of Triple-Layered TiO 2 Nanotubes journal January 2013
3D-nanoarchitectured Pd/Ni catalysts prepared by atomic layer deposition for the electrooxidation of formic acid journal January 2014
In situ XANES study of methanol decomposition and partial oxidation to syn-gas over supported Pt catalyst on SrTiO3 nanocubes journal November 2014
Surface reactions in Al2O3 growth from trimethylaluminium and water by atomic layer epitaxy journal November 1996
In situ synchrotron based x-ray techniques as monitoring tools for atomic layer deposition
  • Devloo-Casier, Kilian; Ludwig, Karl F.; Detavernier, Christophe
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 32, Issue 1 https://doi.org/10.1116/1.4851716
journal January 2014
Template-directed synthesis of porous alumina particles with precise wall thickness control via atomic layer deposition journal February 2012
ATOMIC LAYER DEPOSITION OF SiO 2 USING CATALYZED AND UNCATALYZED SELF-LIMITING SURFACE REACTIONS journal June 1999
The Role of Surface Basal Planes of Layered Mixed Metal Oxides in Selective Transformation of Lower Alkanes: Propane Ammoxidation over Surface ab Planes of Mo−V−Te−Nb−O M1 Phase journal May 2008
Aluminium atomic layer deposition applied to mesoporous zeolites for acid catalytic activity enhancement journal January 2011
Highly dispersed Pt nanoparticle catalyst prepared by atomic layer deposition journal June 2010
Reactions of trimethylaluminum and ammonia on alumina at 600 K — surface chemical aspects of AlN thin film growth journal October 1995
A Single-Event MicroKinetic assessment of n-alkane hydroconversion on ultrastable Y zeolites after Atomic Layer Deposition of alumina journal March 2014
Surface Acidity and Properties of TiO 2 /SiO 2 Catalysts Prepared by Atomic Layer Deposition: UV−visible Diffuse Reflectance, DRIFTS, and Visible Raman Spectroscopy Studies journal June 2009
Synthesis-Dependent Atomic Surface Structures of Oxide Nanoparticles journal October 2013
Applied Catalysis: A Predictive Socioeconomic History journal May 2009
Efficient and Sustained Photoelectrochemical Water Oxidation by Cobalt Oxide/Silicon Photoanodes with Nanotextured Interfaces journal April 2014
Atomic Layer Deposition Preparation of Pd Nanoparticles on a Porous Carbon Support for Alcohol Oxidation journal October 2011
Methanol decomposition over supported palladium and platinum journal November 1998
Tungsten hexacarbonyl and hydrogen peroxide as precursors for the growth of tungsten oxide thin films on titania nanoparticles journal February 2014
Mesoporous Metal Oxides by Vapor Infiltration and Atomic Layer Deposition on Ordered Surfactant Polymer Films journal July 2012
SiO2 film growth at low temperatures by catalyzed atomic layer deposition in a viscous flow reactor journal November 2005
Oriented Catalytic Platinum Nanoparticles on High Surface Area Strontium Titanate Nanocuboids journal March 2011
ALD of SiO[sub 2] at Room Temperature Using TEOS and H[sub 2]O with NH[sub 3] as the Catalyst journal January 2004
Alumina Over-coating on Pd Nanoparticle Catalysts by Atomic Layer Deposition: Enhanced Stability and Reactivity journal January 2011
Atomic layer deposition and surface characterization of highly dispersed titania/silica-supported vanadia catalysts journal February 2003
Rotary reactor for atomic layer deposition on large quantities of nanoparticles
  • McCormick, J. A.; Cloutier, B. L.; Weimer, A. W.
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 25, Issue 1 https://doi.org/10.1116/1.2393299
journal January 2007
Transport behavior of atomic layer deposition precursors through polymer masking layers: Influence on area selective atomic layer deposition
  • Sinha, Ashwini; Hess, Dennis W.; Henderson, Clifford L.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 25, Issue 5 https://doi.org/10.1116/1.2782546
journal January 2007
Encapsulation of supported metal nanoparticles with an ultra-thin porous shell for size-selective reactions journal January 2013
Surface chemistry and film growth during TiN atomic layer deposition using TDMAT and NH3 journal July 2003
Mechanisms and reactions during atomic layer deposition on polymers journal December 2013
Viscous flow reactor with quartz crystal microbalance for thin film growth by atomic layer deposition journal August 2002
Understanding the Chemistry of H 2 Production for 1-Propanol Reforming: Pathway and Support Modification Effects journal September 2012
Synthesis Strategy for Protected Metal Nanoparticles journal March 2012
Ruthenium Oxide Hydrogen Evolution Catalysis on Composite Cuprous Oxide Water-Splitting Photocathodes journal July 2013
Atomic Layer Deposition of Uniform Metal Coatings on Highly Porous Aerogel Substrates journal December 2006
Atomic Layer Deposition of Platinum Nanocatalysts onto Three-Dimensional Carbon Nanotube/Graphene Hybrid journal December 2012
Stabilization of Supported Metal Nanoparticles Using an Ultrathin Porous Shell journal August 2011
CO 2 Reduction to Methanol on TiO 2 -Passivated GaP Photocatalysts journal September 2014
Nanoporous Gold as a Platform for a Building Block Catalyst journal September 2012
Atomic Layer Deposition of Noble Metals and Their Oxides journal September 2013
Refractive index gradients in TiO 2 thin films grown by atomic layer deposition journal December 2005
Effects of catalyst material and atomic layer deposited TiO2 oxide thickness on the water oxidation performance of metal–insulator–silicon anodes journal January 2013
Epitaxial Stabilization of Face Selective Catalysts journal July 2013
Low-Temperature ABC-Type Atomic Layer Deposition: Synthesis of Highly Uniform Ultrafine Supported Metal Nanoparticles journal March 2010
Synthesis of a 3D network of Pt nanowires by atomic layer deposition on a carbonaceous template journal January 2014
Controlled Growth of Platinum Nanoparticles on Strontium Titanate Nanocubes by Atomic Layer Deposition journal March 2009
Ultrathin highly porous alumina films prepared by alucone ABC molecular layer deposition (MLD) journal March 2013
Highly active photocatalytic ZnO nanocrystalline rods supported on polymer fiber mats: Synthesis using atomic layer deposition and hydrothermal crystal growth journal November 2011
Processing of catalysts by atomic layer epitaxy: modification of supports journal November 1997
Growth of titanium dioxide thin films by atomic layer epitaxy journal March 1993
Atomic Layer Deposition of Platinum Catalysts on Nanowire Surfaces for Photoelectrochemical Water Reduction journal August 2013
Highly Dispersed and Active ReO x on Alumina-Modified SBA-15 Silica for 2-Butanol Dehydration journal April 2012
Oxidative dehydrogenation of ethane over alumina-supported Pd catalysts. Effect of alumina overlayer journal January 2013
Synthesis of Pt–Pd Core–Shell Nanostructures by Atomic Layer Deposition: Application in Propane Oxidative Dehydrogenation to Propylene journal September 2012
Atomic Layer Deposition of Platinum Nanoparticles on Carbon Nanotubes for Application in Proton‐Exchange Membrane Fuel Cells journal June 2009
Active MnO x Electrocatalysts Prepared by Atomic Layer Deposition for Oxygen Evolution and Oxygen Reduction Reactions journal June 2012
Growth of SiO2 at Room Temperature with the Use of Catalyzed Sequential Half-Reactions journal December 1997
Growth of p-Type Hematite by Atomic Layer Deposition and Its Utilization for Improved Solar Water Splitting journal March 2012
Advanced Materials Processing by Adsorption Control journal January 1997
Continuous production of nanostructured particles using spatial atomic layer deposition
  • van Ommen, J. Ruud; Kooijman, Dirkjan; Niet, Mark de
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 33, Issue 2 https://doi.org/10.1116/1.4905725
journal March 2015
Fabrication of catalyst by atomic layer deposition for high specific power density proton exchange membrane fuel cells journal October 2012
TiO2/Ni Inverse-Catalysts Prepared by Atomic Layer Deposition (ALD) journal April 2011
Structural effects on trends in the deposition and dissolution of metal-supported metal adstructures journal August 2010
Novel, uniform nanostructured catalytic membranes journal October 2006
Phänomenologische Theorie der Kristallabscheidung an Oberflächen. I journal January 1958
ALD Functionalized Nanoporous Gold: Thermal Stability, Mechanical Properties, and Catalytic Activity journal August 2011
Nanocoating Individual Silica Nanoparticles by Atomic Layer Deposition in a Fluidized Bed Reactor journal October 2005
Atomic layer-deposited tunnel oxide stabilizes silicon photoanodes for water oxidation journal June 2011
Substrate Dependent Water Splitting with Ultrathin α-Fe 2 O 3 Electrodes journal May 2014
Studies of the effect of calcination on the dispersion and reduction of nickel supported on alumina by X-ray photoelectron spectroscopy, X-ray diffraction, chemisorption and catalytic activity
  • Narayanan, Sankarasubbier; Uma, Kadiyala
  • Journal of the Chemical Society, Faraday Transactions 1: Physical Chemistry in Condensed Phases, Vol. 81, Issue 11 https://doi.org/10.1039/f19858102733
journal January 1985
Atomic Layer Deposition of Tin Monosulfide Thin Films journal September 2011
Hierarchical, Titania-Coated, Carbon Nanofibrous Material Derived from a Natural Cellulosic Substance journal June 2010
Surface chemistry of Al2O3 deposition using Al(CH3)3 and H2O in a binary reaction sequence journal January 1995
Carbon dioxide reforming of methane to synthesis gas over a TiO2–Ni inverse catalyst journal January 2013
CoFe2O4 on a porous Al2O3 nanostructure for solar thermochemical CO2 splitting journal January 2012
Hot-Wire Generated Atomic Hydrogen and its Impact on Thermal ALD in TiCl 4 /NH 3 System journal January 2013
Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH 3 on Particles Agitated in a Rotary Reactor journal May 2014
Molecular Layer Deposition of Alucone Polymer Films Using Trimethylaluminum and Ethylene Glycol journal May 2008
Vapor-Phase Metalation by Atomic Layer Deposition in a Metal–Organic Framework
  • Mondloch, Joseph E.; Bury, Wojciech; Fairen-Jimenez, David
  • Journal of the American Chemical Society, Vol. 135, Issue 28, p. 10294-10297 https://doi.org/10.1021/ja4050828
journal May 2013
Inorganic Hollow Nanotube Aerogels by Atomic Layer Deposition onto Native Nanocellulose Templates journal February 2011
Maximizing Activity and Stability by Turning Gold Catalysis Upside Down: Oxide Particles on Nanoporous Gold journal March 2013
Growth mechanisms of mixed oxides on alumina journal March 1997
ZnO/Al2O3 nanolaminates fabricated by atomic layer deposition: growth and surface roughness measurements journal July 2002
Organic and inorganic–organic thin film structures by molecular layer deposition: A review journal January 2014
Tailoring nanoporous materials by atomic layer deposition journal January 2011
Microcontact patterning of ruthenium gate electrodes by selective area atomic layer deposition journal January 2005
Electrocatalytic activity of atomic layer deposited Pt–Ru catalysts onto N-doped carbon nanotubes journal March 2014
An atomic layer deposition chamber for in situ x-ray diffraction and scattering analysis journal May 2014
Atomic layer deposition of WxN/TiN and WNxCy/TiN nanolaminates journal June 2003
Reaction Mechanism Studies on Titanium Isopropoxide–Water Atomic Layer Deposition Process journal January 2002
Palladium Catalysts Synthesized by Atomic Layer Deposition for Methanol Decomposition journal May 2010
Kinetic study on hot-wire-assisted atomic layer deposition of nickel thin films
  • Yuan, Guangjie; Shimizu, Hideharu; Momose, Takeshi
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 32, Issue 1 https://doi.org/10.1116/1.4829361
journal January 2014
Toward atomically-precise synthesis of supported bimetallic nanoparticles using atomic layer deposition journal February 2014
Atomic Layer Deposition, Characterization, and Dielectric Properties of HfO2/SiO2 Nanolaminates and Comparisons with Their Homogeneous Mixtures journal March 2006
Polymer–Inorganic Core–Shell Nanofibers by Electrospinning and Atomic Layer Deposition: Flexible Nylon–ZnO Core–Shell Nanofiber Mats and Their Photocatalytic Activity journal November 2012
Coking- and Sintering-Resistant Palladium Catalysts Achieved Through Atomic Layer Deposition journal March 2012
Catalytic activation of OKO zeolite with intersecting pores of 10- and 12-membered rings using atomic layer deposition of aluminium journal January 2014
ZrO 2 –In 2 O 3 thin layers with gradual ionic to electronic composition synthesized by atomic layer deposition for SOFC applications journal January 2009
Atomic layer deposition of Pt nanocatalysts on graphene oxide nanosheets for electro-oxidation of formic acid journal December 2012
Atomic Layer Deposition: An Overview journal January 2010
Atomic level epitaxy of 3C-SiC by low pressure vapour deposition with alternating gas supply journal March 1993
Gyroid-Structured 3D ZnO Networks Made by Atomic Layer Deposition journal September 2013
Water Splitting by Tungsten Oxide Prepared by Atomic Layer Deposition and Decorated with an Oxygen-Evolving Catalyst journal December 2010
SrTiO 3 Nanocuboids from a Lamellar Microemulsion journal January 2013
Atomic layer epitaxy (ALE) on porous substrates journal January 1994