Variable line spacing diffraction grating fabricated by direct write lithography for synchrotron beamline applications
Conference
·
OSTI ID:1167441
- Research Organization:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- USDOE Office of Science (SC)
- DOE Contract Number:
- DE-AC02-05CH11231
- OSTI ID:
- 1167441
- Report Number(s):
- LBNL-6895E
- Resource Relation:
- Conference: SPIE 2014
- Country of Publication:
- United States
- Language:
- English
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