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Title: Resonant-frequency discharge in a multi-cell radio frequency cavity

We are reporting experimental results on microwave discharge operating at resonant frequency in a multi-cell radio frequency (RF) accelerator cavity. Although the discharge operated at room temperature, the setup was constructed so that it could be used for plasma generation and processing in fully assembled active superconducting radio-frequency (SRF) cryomodule (in situ operation). This discharge offers an efficient mechanism for removal of a variety of contaminants, organic or oxide layers, and residual particulates from the interior surface of RF cavities through the interaction of plasma-generated radicals with the cavity walls. We describe resonant RF breakdown conditions and address the problems related to generation and sustaining the multi-cell cavity plasma, which are breakdown and resonant detuning. We have determined breakdown conditions in the cavity, which was acting as a plasma vessel with distorted cylindrical geometry. We discuss the spectroscopic data taken during plasma removal of contaminants and use them to evaluate plasma parameters, characterize the process, and estimate the volatile contaminant product removal.
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Publication Date:
OSTI Identifier:
Report Number(s):
JLAB-ACC-13-1845; DOE/OR/23177-3140
Journal ID: ISSN 0021-8979; JAPIAU
DOE Contract Number:
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 116; Journal Issue: 17
American Institute of Physics (AIP)
Research Org:
Thomas Jefferson National Accelerator Facility, Newport News, VA (United States)
Sponsoring Org:
USDOE Office of Science (SC)
Country of Publication:
United States