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Title: Thickness Determination of Few-Layer Hexagonal Boron Nitride Films by Scanning Electron Microscopy and Auger Electron Spectroscopy

Journal Article · · APL Materials
DOI:https://doi.org/10.1063/1.4889815· OSTI ID:1165693

Research Organization:
Brookhaven National Lab. (BNL), Upton, NY (United States)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
DOE Contract Number:
DE-AC02-98CH10886
OSTI ID:
1165693
Report Number(s):
BNL-107102-2014-JA; R&D Project: 16080/16080; KC0403020
Journal Information:
APL Materials, Vol. 2
Country of Publication:
United States
Language:
English