Spectroscopic imaging of self-organization in high power impulse magnetron sputtering plasmas

Journal Article · Wed Jul 17 00:00:00 EDT 2013 · Applied Physics Letters

OSTI ID:1165476

Andersson, Joakim; Ni, Pavel; Anders, Andre

Excitation and ionization conditions in traveling ionization zones of high power impulse magnetron sputtering plasmas were investigated using fast camera imaging through interference filters. The images, taken in end-on and side on views using light of selected gas and target atom and ion spectral lines, suggest that ionization zones are regions of enhanced densities of electrons, and excited atoms and ions. Excited atoms and ions of the target material (Al) are strongly concentrated near the target surface. Images from the highest excitation energies exhibit the most localized regions, suggesting localized Ohmic heating consistent with double layer formation.

• Research Organization: Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
• Sponsoring Organization: USDOE Office of Science (SC)
• DOE Contract Number: DE-AC02-05CH11231
• OSTI ID: 1165476
• Report Number(s): LBNL-6658E
• Journal Information: Applied Physics Letters, Vol. 103; Related Information: Journal Publication Date: 2013-07-31
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
high power impulse magentron sputtering
plasma diagnostics
spectroscopy