Method of fabricating a micro machine
Patent
·
OSTI ID:1163671
A micro machine may be in or less than the micrometer domain. The micro machine may include a micro actuator and a micro shaft coupled to the micro actuator. The micro shaft is operable to be driven by the micro actuator. A tool is coupled to the micro shaft and is operable to perform work in response to at least motion of the micro shaft.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- MicroZeus, LLC (Dallas, TX)
- Patent Number(s):
- 8,884,474
- Application Number:
- 11/757,313
- OSTI ID:
- 1163671
- Resource Relation:
- Patent File Date: 2007 Jun 01
- Country of Publication:
- United States
- Language:
- English
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