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Title: Method to fabricate micro and nano diamond devices

Abstract

A method including forming a diamond material on the surface of a substrate; forming a first contact and a separate second contact; and patterning the diamond material to form a nanowire between the first contact and the second contact. An apparatus including a first contact and a separate second contact on a substrate; and a nanowire including a single crystalline or polycrystalline diamond material on the substrate and connected to each of the first contact and the second contact.

Inventors:
; ; ; ;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1160137
Patent Number(s):
8,852,998
Application Number:
13/598,152
Assignee:
Sandia Corporation (Albuquerque, NM)
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Resource Relation:
Patent File Date: 2012 Aug 29
Country of Publication:
United States
Language:
English
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY

Citation Formats

Morales, Alfredo M, Anderson, Richard J, Yang, Nancy Y. C., Skinner, Jack L, and Rye, Michael J. Method to fabricate micro and nano diamond devices. United States: N. p., 2014. Web.
Morales, Alfredo M, Anderson, Richard J, Yang, Nancy Y. C., Skinner, Jack L, & Rye, Michael J. Method to fabricate micro and nano diamond devices. United States.
Morales, Alfredo M, Anderson, Richard J, Yang, Nancy Y. C., Skinner, Jack L, and Rye, Michael J. 2014. "Method to fabricate micro and nano diamond devices". United States. https://www.osti.gov/servlets/purl/1160137.
@article{osti_1160137,
title = {Method to fabricate micro and nano diamond devices},
author = {Morales, Alfredo M and Anderson, Richard J and Yang, Nancy Y. C. and Skinner, Jack L and Rye, Michael J},
abstractNote = {A method including forming a diamond material on the surface of a substrate; forming a first contact and a separate second contact; and patterning the diamond material to form a nanowire between the first contact and the second contact. An apparatus including a first contact and a separate second contact on a substrate; and a nanowire including a single crystalline or polycrystalline diamond material on the substrate and connected to each of the first contact and the second contact.},
doi = {},
url = {https://www.osti.gov/biblio/1160137}, journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Oct 07 00:00:00 EDT 2014},
month = {Tue Oct 07 00:00:00 EDT 2014}
}

Works referenced in this record:

Diamond cold cathode
patent, September 1997


Semiconductor nano-rod devices
patent-application, June 2005


Method of fabricating n-type semiconductor diamond, and semiconductor diamond
patent-application, May 2007


Methods of Making Nanowires
patent-application, August 2013


Fabrication of GaN-based nanoscale device structures utilizing focused ion beam induced Pt deposition
journal, July 2006


High-performance lithium battery anodes using silicon nanowires
journal, December 2007


Efficient hybrid density functional calculations in solids: Assessment of the Heyd–Scuseria–Ernzerhof screened Coulomb hybrid functional
journal, July 2004


Cross-sectional transmission electron microscopy method and studies of implant damage in single crystal diamond
journal, July 2006

  • Hickey, D. P.; Kuryliw, E.; Siebein, K.
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 24, Issue 4, p. 1302-1307
  • https://doi.org/10.1116/1.2209659