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Title: Recent advances in multilayer reflective optics for EUV/x-ray sources

Conference ·
; ; ; ; ; ; ;

Research Organization:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
DE-AC52-07NA27344
OSTI ID:
1150038
Report Number(s):
LLNL-PROC-658118
Resource Relation:
Journal Volume: 169; Conference: Presented at: 14th International Conference on X-Ray Lasers, Fort Collins, CO, United States, May 26 - May 30, 2014
Country of Publication:
United States
Language:
English

References (13)

Soft-X-ray reflectivity and heat resistance of SiC/Mg multilayer journal June 2005
Corrosion-resistant high-reflectance Mg/SiC multilayer coatings for solar physics in the 25-80 nm wavelength region conference September 2012
Spontaneously intermixed Al-Mg barriers enable corrosion-resistant Mg/SiC multilayer coatings journal July 2012
Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region journal January 2012
Corrosion-resistant Mg/SiC multilayer coatings for EUV laser sources in the 25-80nm wavelength region conference September 2013
Extreme-ultraviolet microexposure tool at 05 NA for sub-16 nm lithography journal January 2008
Update on the SEMATECH 0.5 NA Extreme-Ultraviolet Lithography (EUVL) Microfield Exposure Tool (MET) conference April 2014
Projection optics for EUVL micro-field exposure tools with 0.5 NA conference April 2014
Sub-diffraction-limited multilayer coatings for the 03 numerical aperture micro-exposure tool for extreme ultraviolet lithography journal January 2007
Ultra-short-period WC/SiC multilayer coatings for x-ray applications
  • Fernández-Perea, Mónica; Pivovaroff, Mike J.; Soufli, Regina
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 710 https://doi.org/10.1016/j.nima.2012.10.066
journal May 2013
Physics of Reflective Optics for the Soft Gamma-Ray Photon Energy Range journal July 2013
Demonstration of multilayer reflective optics at photon energies above 06 MeV journal January 2014
Gamma-ray mirrors for direct measurement of spent nuclear fuel
  • Pivovaroff, Michael J.; Ziock, Klaus P.; Fernandez-Perea, Monica
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 743 https://doi.org/10.1016/j.nima.2014.01.005
journal April 2014

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