Semiconductor wafer heating chamber
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patent
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July 1988 |
Method and apparatus for substrate heating in an axially symmetric epitaxial deposition apparatus
|
patent
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December 1988 |
Method for the manufacture of vacuum tubes stems
|
patent
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July 1989 |
Process and apparatus for producing temperature profiles in a workpiece as it passes through a belt furnace
|
patent
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January 1991 |
Back-side hydrogenation technique for defect passivation in silicon solar cells
|
patent
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April 1994 |
Dry texturing of solar cells
|
patent
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October 1994 |
Apparatus for and method of rapid testing of semiconductor components at elevated temperature
|
patent
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April 1995 |
Impurity gettering in semiconductors
|
patent
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June 1995 |
Fabrication of optically reflecting ohmic contacts for semiconductor devices
|
patent
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July 1995 |
High performance multi-zone illuminator module for semiconductor wafer processing
|
patent
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August 1995 |
Optical processing furnace with quartz muffle and diffuser plate
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patent
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September 1995 |
Optical processing furnace with quartz muffle and diffuser plate
|
patent
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November 1996 |
Apparatus for making optically fused semiconductor powder for solar cells
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patent
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March 1997 |
Fault detection for entire wafer stress test
|
patent
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April 1997 |
Application of optical processing for growth of silicon dioxide
|
patent
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June 1997 |
Method for monitoring surface stress
|
patent
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December 1997 |
High efficiency low cost thin film silicon solar cell design and method for making
|
patent
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April 1999 |
Heating device for semiconductor wafers
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patent
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October 1999 |
Lid assembly for high temperature processing chamber
|
patent
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February 2000 |
Furnace for rapid thermal processing with optical switching film disposed between heater and reflector
|
patent
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April 2000 |
Method and apparatus for enhancing the efficiency of radiant energy sources used in rapid thermal processing of substrates by energy reflection
|
patent
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June 2000 |
High efficiency, low cost, thin film silicon solar cell design and method for making
|
patent
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March 2001 |
Heating device containing a multi-lamp cone for heating semiconductor wafers
|
patent
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April 2001 |
Apparatus for uniform gas and radiant heat dispersion for solid state fabrication processes
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patent
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May 2001 |
Thermally developable material
|
patent
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July 2001 |
Accelerated thermal stress cycle test
|
patent
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August 2003 |
Edge flaw inspection device
|
patent
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September 2004 |
Apparatus and method for rapid photo-thermal surfaces treatment
|
patent
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October 2004 |
Method for automatically controlling defect -specification in a semiconductor manufacturing process
|
patent
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October 2004 |
Method and apparatus for detecting defects along the edge of electronic media
|
patent
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November 2004 |
Wafer edge polishing system
|
patent
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January 2005 |
Metal processing for impurity gettering in silicon
|
patent
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February 2005 |
Method for inspecting silicon wafer, method for manufacturing silicon wafer, method for fabricating semiconductor device, and silicon wafer
|
patent
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March 2005 |
Wafer characteristics via reflectometry and wafer processing apparatus and method
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patent
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July 2007 |
Apparatus and method for determining stress in solar cells
|
patent
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August 2010 |
Silicon wafer and process for the heat treatment of a silicon wafer
|
patent
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November 2010 |
Sensor-based orientation system
|
patent
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August 2011 |
Screening of silicon wafers used in photovoltaics
|
patent
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August 2011 |
Rapid thermal processing chamber for processing multiple wafers
|
patent-application
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January 2002 |
Heat treatment device of the light irradiation type and heat treatment process of the irradiation type
|
patent-application
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April 2003 |
Automated wafer defect inspection system and a process of performing such inspection
|
patent-application
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January 2005 |
Method and its apparatus for inspecting particles or defects of a semiconductor device
|
patent-application
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December 2005 |
Wafer inspection system and method thereof
|
patent-application
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December 2005 |
Monitoring semiconductor wafer defects below one nanometer
|
patent-application
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February 2006 |
Apparatus and method for thermal processing
|
patent-application
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August 2006 |
Structure and Method for Thermally Stressing or Testing a Semiconductor Device
|
patent-application
|
October 2007 |
High-flux solar furnace processing of silicon solar cells
- Tsuo, Y. S.; Pitts, J. R.; Landry, M. D.
-
Proceedings of 1994 IEEE 1st World Conference on Photovoltaic Energy Conversion - WCPEC (A Joint Conference of PVSC, PVSEC and PSEC)
https://doi.org/10.1109/WCPEC.1994.520186
|
conference
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January 1994 |
A high throughput, noncontact system for screening silicon wafers predisposed to breakage during solar cell production
|
conference
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June 2011 |
Graphic script provides quick classification of GaAs wafers
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journal
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March 2000 |
Non-destructive optical methods for assessing defects in production of Si or SiGe materials
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journal
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July 2004 |