Gas feeding molecular phosphorous ion source for semiconductor implanters
Journal Article
·
· Review of Scientific Instruments
OSTI ID:1143626
- Research Organization:
- Brookhaven National Lab. (BNL), Upton, NY (United States)
- Sponsoring Organization:
- USDOE SC OFFICE OF SCIENCE (SC)
- DOE Contract Number:
- DE-AC02-98CH10886
- OSTI ID:
- 1143626
- Report Number(s):
- BNL-105501-2014-JA; R&D Project: KBCH139; 18033; KB0202011
- Journal Information:
- Review of Scientific Instruments, Vol. 85; Conference: 15th International conference on Ion Sources (ICIS 13); Chiba, Japan; 20130909 through 20130913
- Country of Publication:
- United States
- Language:
- English
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