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Title: LARGE VIBRATION AMPLITUDE REALIZED IN AN ALUMINUM NITRIDE PMUT.

Abstract not provided.
Authors:
; ;
Publication Date:
OSTI Identifier:
1141000
Report Number(s):
SAND2014-2127C
505353
DOE Contract Number:
AC04-94AL85000
Resource Type:
Conference
Resource Relation:
Conference: Proposed for presentation at the Hilton Head Workshop 2014: A Solid-State Sensors, Actuators and Microsystems Workshop held June 8-12, 2014 in Hilton Head, SC.
Research Org:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org:
USDOE National Nuclear Security Administration (NNSA)
Country of Publication:
United States
Language:
English