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Title: Angular distribution and recoil effect for 1 MeV Au+ ions through a Si3N4 thin foil

The Stopping and Range of Ions in Matter (SRIM) code has been widely used to predict nuclear stopping power and angular distribution of ion-solid collisions. However, experimental validation of the predictions is insufficient for slow heavy ions in nonmetallic compounds. In this work, time-of-flight secondary ion mass spectrometry (ToF-SIMS) is applied to determine the angular distribution of 1 MeV Au ions after penetrating a Si3N4 foil with a thickness of ~100 nm. The exiting Au ions are collected by a Si wafer located ~14 mm behind the Si3N4 foil, and the resulting 2-dimensional distribution of Au ions on the Si wafer is measured by ToF-SIMS. The SRIM-predicted angular distribution of Au ions through the Si3N4 thin foil is compared with the measured results, indicating that SRIM slightly overestimates the nuclear stopping power by up to 10%. In addition, thickness reduction of the suspended Si3N4 foils induced by 1 MeV Au ion irradiation is observed with an average loss rate of ~107 atom/ion.
 [1] ;  [2] ;  [2] ;  [2] ;  [1] ;  [2] ;  [2] ;  [3] ;  [3]
  1. University of Tennessee, Knoxville (UTK)
  2. Pacific Northwest National Laboratory (PNNL)
  3. ORNL
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Conference: The 21st International Conference on Ion Beam Analysis (IBA 2013), Seattle, WA, USA, 20130623, 20130628
Research Org:
Oak Ridge National Laboratory (ORNL)
Sponsoring Org:
SC USDOE - Office of Science (SC); ME USDOE - Office of Management, Budget, and Evaluation; ORNL work for others
Country of Publication:
United States