Angular distribution and recoil effect for 1 MeV Au+ ions through a Si3N4 thin foil

Conference · Wed Jan 01 00:00:00 EST 2014

OSTI ID:1134161

Jin, Ke ^[1]; Zhu, Zihua ^[2]; Manandhar, Sandeep ^[2]; Liu, Jia ^[2]; Chen, Chien-Hung ^[1]; Shutthanandan, Vaithiyalingam ^[2]; Thevuthasan, Suntharampillai ^[2]; Weber, William J ^[3]; Zhang, Yanwen ^[3]

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1. University of Tennessee, Knoxville (UTK)
2. Pacific Northwest National Laboratory (PNNL)
3. ORNL

The Stopping and Range of Ions in Matter (SRIM) code has been widely used to predict nuclear stopping power and angular distribution of ion-solid collisions. However, experimental validation of the predictions is insufficient for slow heavy ions in nonmetallic compounds. In this work, time-of-flight secondary ion mass spectrometry (ToF-SIMS) is applied to determine the angular distribution of 1 MeV Au ions after penetrating a Si3N4 foil with a thickness of ~100 nm. The exiting Au ions are collected by a Si wafer located ~14 mm behind the Si3N4 foil, and the resulting 2-dimensional distribution of Au ions on the Si wafer is measured by ToF-SIMS. The SRIM-predicted angular distribution of Au ions through the Si3N4 thin foil is compared with the measured results, indicating that SRIM slightly overestimates the nuclear stopping power by up to 10%. In addition, thickness reduction of the suspended Si3N4 foils induced by 1 MeV Au ion irradiation is observed with an average loss rate of ~107 atom/ion.

• Research Organization: Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
• Sponsoring Organization: USDOE Office of Science (SC); Work for Others (WFO)
• DOE Contract Number: DE-AC05-00OR22725
• OSTI ID: 1134161
• Resource Relation: Conference: The 21st International Conference on Ion Beam Analysis (IBA 2013), Seattle, WA, USA, 20130623, 20130628
• Country of Publication: United States
• Language: English