Contact stress sensor

Kotovsky, Jack

Title: Contact stress sensor

Patent · Tue Feb 11 00:00:00 EST 2014

OSTI ID:1124617

Kotovsky, Jack

A method for producing a contact stress sensor that includes one or more MEMS fabricated sensor elements, where each sensor element of includes a thin non-recessed portion, a recessed portion and a pressure sensitive element adjacent to the recessed portion. An electric circuit is connected to the pressure sensitive element. The circuit includes a pressure signal circuit element configured to provide a signal upon movement of the pressure sensitive element.

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Research Organization:: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: AC52-07NA27344

Assignee:: Lawrence Livermore National Security, LLC (Livermore, CA)

Patent Number(s):: 8,646,335

Application Number:: 13/349,492

OSTI ID:: 1124617

Country of Publication:: United States

Language:: English

References (30)

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