Pyrolysis of 2D and 3D Interferometrically Patterned Resist Structures.
Journal Article
·
· Journal of Vacuum Science and Technology - B
Abstract not provided.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- DE-AC04-94AL85000
- OSTI ID:
- 1123421
- Report Number(s):
- SAND2010-3929J; 492229
- Journal Information:
- Journal of Vacuum Science and Technology - B, Vol. 28, Issue 6; Related Information: Proposed for publication in Journal of Vacuum Science and Technology - B.; ISSN 1071-1023
- Country of Publication:
- United States
- Language:
- English
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