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Title: ECR Nb Films Grown on Amorphous and Crystalline Cu Substrates: Influence of Ion Energy

In the pursuit of niobium (Nb) films with similar performance with the commonly used bulk Nb surfaces for Superconducting RF (SRF) applications, significant progress has been made with the development of energetic condensation deposition techniques. Using energetic condensation of ions extracted from plasma generated by Electron Cyclotron Resonance, it has been demonstrated that Nb films with good structural properties and RRR comparable to bulk values can be produced on metallic substrates. The controlled incoming ion energy enables a number of processes such as desorption of adsorbed species, enhanced mobility of surface atoms and sub-implantation of impinging ions, thus producing improved film structures at lower process temperatures. Particular attention is given to the nucleation conditions to create a favourable template for growing the final surface exposed to SRF fields. The influence of the deposition energy on film growth on copper substrates is investigated with the characterization of the film surface, structure, superconducting properties and RF performance.
 [1] ;  [1] ;  [1] ;  [1] ;  [1] ;  [2] ;  [3] ;  [4]
  1. Thomas Jefferson National Accelerator Facility, Newport News, VA (United States)
  2. Illinois Inst. of Technology, Chicago, IL (United States)
  3. Argonne National Laboratory, Argonne, IL (United States)
  4. Univ. of Illinois at Chicago, Chicago, IL (United States)
Publication Date:
OSTI Identifier:
Report Number(s):
JLAB-ACC--13-1709; DOE/OR/23177-2833; TUP079
TRN: US1400255
DOE Contract Number:
Resource Type:
Resource Relation:
Conference: SRF 2013 (RF Superconductivity), Paris (France), 23-27 Sep 2013
Research Org:
Thomas Jefferson National Accelerator Facility, Newport News, VA (United States)
Sponsoring Org:
USDOE Office of Science (SC) (United States)
Country of Publication:
United States