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Title: Modulated microwave microscopy and probes used therewith

Abstract

A microwave microscope including a probe tip electrode vertically positionable over a sample and projecting downwardly from the end of a cantilever. A transmission line connecting the tip electrode to the electronic control system extends along the cantilever and is separated from a ground plane at the bottom of the cantilever by a dielectric layer. The probe tip may be vertically tapped near or at the sample surface at a low frequency and the microwave signal reflected from the tip/sample interaction is demodulated at the low frequency. Alternatively, a low-frequency electrical signal is also a non-linear electrical element associated with the probe tip to non-linearly interact with the applied microwave signal and the reflected non-linear microwave signal is detected at the low frequency. The non-linear element may be semiconductor junction formed near the apex of the probe tip or be an FET formed at the base of a semiconducting tip.

Inventors:
; ;
Publication Date:
Research Org.:
Leland Stanford Junior University (Stanford, CA)
Sponsoring Org.:
USDOE
OSTI Identifier:
1078319
Patent Number(s):
8,266,718
Application Number:
12/706,190
Assignee:
The Board of Trustees of Leland Stanford Junior University (Stanford, CA)
DOE Contract Number:  
FG033-01ER45929-A001; FG36-08GOU7994
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Lai, Keji, Kelly, Michael, and Shen, Zhi-Xun. Modulated microwave microscopy and probes used therewith. United States: N. p., 2012. Web.
Lai, Keji, Kelly, Michael, & Shen, Zhi-Xun. Modulated microwave microscopy and probes used therewith. United States.
Lai, Keji, Kelly, Michael, and Shen, Zhi-Xun. 2012. "Modulated microwave microscopy and probes used therewith". United States. https://www.osti.gov/servlets/purl/1078319.
@article{osti_1078319,
title = {Modulated microwave microscopy and probes used therewith},
author = {Lai, Keji and Kelly, Michael and Shen, Zhi-Xun},
abstractNote = {A microwave microscope including a probe tip electrode vertically positionable over a sample and projecting downwardly from the end of a cantilever. A transmission line connecting the tip electrode to the electronic control system extends along the cantilever and is separated from a ground plane at the bottom of the cantilever by a dielectric layer. The probe tip may be vertically tapped near or at the sample surface at a low frequency and the microwave signal reflected from the tip/sample interaction is demodulated at the low frequency. Alternatively, a low-frequency electrical signal is also a non-linear electrical element associated with the probe tip to non-linearly interact with the applied microwave signal and the reflected non-linear microwave signal is detected at the low frequency. The non-linear element may be semiconductor junction formed near the apex of the probe tip or be an FET formed at the base of a semiconducting tip.},
doi = {},
url = {https://www.osti.gov/biblio/1078319}, journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Sep 11 00:00:00 EDT 2012},
month = {Tue Sep 11 00:00:00 EDT 2012}
}

Works referenced in this record:

Near-field microwave microscope with improved sensitivity and spatial resolution
journal, June 2003


Calibration of shielded microwave probes using bulk dielectrics
journal, September 2008