Chip-Scale Nanofabrication of Single Spins and Spin Arrays in Diamond
We demonstrate a technique to nanofabricate nitrogen vacancy (NV) centers in diamond based on broad-beam nitrogen implantation through apertures in electron beam lithography resist. This method enables high-throughput nanofabrication of single NV centers on sub-100-nm length scales. Secondary ion mass spectroscopy measurements facilitate depth profiling of the implanted nitrogen to provide three-dimensional characterization of the NV center spatial distribution. Measurements of NV center coherence with on-chip coplanar waveguides suggest a pathway for incorporating this scalable nanofabrication technique in future quantum applications.
- Research Organization:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- Accelerator& Fusion Research Division
- DOE Contract Number:
- DE-AC02-05CH11231
- OSTI ID:
- 1048311
- Report Number(s):
- LBNL-4959E; TRN: US201216%%888
- Journal Information:
- Nano Letters, Vol. 10, Issue 8
- Country of Publication:
- United States
- Language:
- English
Similar Records
On-Chip Single-Layer Integration of Diamond Spins with Microwave and Plasmonic Channels
Tunable and Transferable Diamond Membranes for Integrated Quantum Technologies
A vertically-loaded diamond microdisk resonator spin-photon interface
Journal Article
·
Mon Jul 20 00:00:00 EDT 2020
· ACS Photonics
·
OSTI ID:1048311
+3 more
Tunable and Transferable Diamond Membranes for Integrated Quantum Technologies
Journal Article
·
Mon Dec 13 00:00:00 EST 2021
· Nano Letters
·
OSTI ID:1048311
+7 more
A vertically-loaded diamond microdisk resonator spin-photon interface
Journal Article
·
Thu Dec 09 00:00:00 EST 2021
· Optics Express
·
OSTI ID:1048311
+1 more