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Title: Detection of electromagnetic waves using charged MEMS structures

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.3689017· OSTI ID:1036182

We describe micromechanical structures that are capable of sensing both electrostatic fields and electromagnetic fields over a wide frequency range. Typically, sensing of electromagnetic waves is achieved with electrically conducting antennas, which despite the many advantages do not exhibit high sensitivity over a broad frequency range. An important aspect of our present work is that, in contrast to traditional antennas, the dimensions of micromechanical oscillators sensitive to electromagnetic waves can be much smaller than the wavelength. We characterized the micromechanical oscillators and measured responses to electric fields and estimated the performance limits by evaluating the signal-to-noise ratio theoretically and experimentally.

Research Organization:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Organization:
USDOE Laboratory Directed Research and Development (LDRD) Program
DOE Contract Number:
DE-AC05-00OR22725
OSTI ID:
1036182
Journal Information:
Applied Physics Letters, Vol. 100, Issue 10; ISSN 0003-6951
Country of Publication:
United States
Language:
English