Size, effect of flexible proof mass on the mechanical behavior of micron-scale cantilevers for energy harvesting appications.

Journal Article · Thu Dec 15 00:00:00 EST 2011 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.3663858· OSTI ID:1035768

Kim, M; Hong, S; Miller, D J; Dugundji, J; Wardle, B L ^[1]

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1. Materials Science Division

Mechanical behavior of micron-scale cantilevers with a distributed, flexible proof mass is investigated to understand proof mass size effects on the performance of microelectromechanical system energy harvesters. Single-crystal silicon beams with proof masses of various lengths were fabricated using focused ion beam milling and tested using atomic force microscopy. Comparison of three different modeling results with measured data reveals that a 'two-beam' method has the most accurate predictive capability in terms of both resonant frequency and strain. Accurate strain prediction is essential because energy harvested scales with strain squared and maximum strain will be a design limit in fatigue.

• Research Organization: Argonne National Lab. (ANL), Argonne, IL (United States)
• Sponsoring Organization: USDOE Office of Science (SC)
• DOE Contract Number: DE-AC02-06CH11357
• OSTI ID: 1035768
• Report Number(s): ANL/MSD/JA-72308; APPLAB; TRN: US201205%%382
• Journal Information: Applied Physics Letters, Vol. 99, Issue 24; ISSN 0003-6951
• Country of Publication: United States
• Language: ENGLISH

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ATOMIC FORCE MICROSCOPY
DESIGN
FORECASTING
HARVESTING
ION BEAMS
MILLING
PERFORMANCE
SILICON
SIMULATION
STRAINS