Fabrication of chalcogenide glass waveguide for IR evanescent wave sensors

Conference · Sat Jan 24 00:00:00 EST 2004

DOI:https://doi.org/10.1117/12.573900· OSTI ID:1035016

Ganjoo, Ashtosh; Jain, H; Ryan, Joseph V; Song, R; Chanda, R; Irudayaraj, Chanda J; Ding, Y J; Pantano, C G

Thin film multi-layered chalcogenide glass waveguide structures have been fabricated for evanescent wave sensing of bio toxins and other applications. Thin films of Ge containing chalcogenides have been deposited onto Si substrates, with a-GeSe2 as the cladding layer and a-GeSbSe as the core layer to form the slab waveguide. Channel waveguides have been written in the slab waveguides by appropriate light the through a mask. The photo-induced structural changes in the core layer selectively enhance refractive index at the portions of interest and thus confining the light to the channels. The waveguides have been characterized and tested for the guiding of light.

• Research Organization: Pacific Northwest National Lab. (PNNL), Richland, WA (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: AC05-76RL01830
• OSTI ID: 1035016
• Report Number(s): PNNL-SA-85360; TRN: US201204%%297
• Resource Relation: Conference: Proceedings of the SPIE: Nanosensing: Materials and Devices, October 25, 2004, Philadelphia, Pennsylvania, 5593:Paper No. 637
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
CHALCOGENIDES
FABRICATION
GLASS
REFRACTIVE INDEX
SENSORS
SUBSTRATES
THIN FILMS
TOXINS
WAVEGUIDES
Chalcogenide glasses
waveguide
evanescent wave bio sensor
photoinduced structural changes
laser writing