Metastable Phase Formation During the Reaction of Ni Films with Si(001): the Role of Texture Inheritance
The thermally induced solid-state reaction between a 10-nm-thick Ni film and a Si(001) substrate was investigated using in situ x-ray diffraction and ex situ pole figure analyses. The reaction begins with the appearance of orthorhombic Ni{sub 2}Si grains characterized by a strong fiber texture. The formation of the metastable hexagonal {theta} phase - which inherits the fiber texture of Ni{sub 2}Si - is then observed. This phase has been observed in every sample studied regardless of dopant, film thickness, deposition method, and anneal profile (>2000 conditions). Texture inheritance allows a reaction pathway with a lower activation energy than the expected formation through thermodynamically stable Ni silicide phases.
- Research Organization:
- Brookhaven National Lab. (BNL), Upton, NY (United States). National Synchrotron Light Source
- Sponsoring Organization:
- DOE - OFFICE OF SCIENCE
- DOE Contract Number:
- DE-AC02-98CH10886
- OSTI ID:
- 1019776
- Report Number(s):
- BNL-95622-2011-JA; JAPIAU; TRN: US201115%%415
- Journal Information:
- Journal of Applied Physics, Vol. 107, Issue 9; ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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