Measurements and analysis of the equivalent circuit of the GEC RF Reference Cell
- Illinois Univ., Urbana, IL (United States). Dept. of Electrical and Computer Engineering
The equivalent circuit of the GEC RF Reference Cell is determined by the use of a vector impedance meter and reported here. The measurement procedure and data reduction techniques are discussed and typical data are presented from which the component values are determined. Once the circuit is established, one can use it to define the ABCD parameters of the Cell which relate the terminal measurements to those at the plasma. A significant and as yet unresolved question is emphasized: namely, {open_quotes}what is the path for the rf current?{close_quotes} An experimental procedure for answering this question is suggested, but there does not appear to be a simple {open_quotes}plasma{close_quotes} reason for the answer. To obtain such an answer is a challenge to the experimenters and modelers. While the emphasis is on the GEC RF Reference Cell, the procedure, data reduction techniques, and {open_quotes}the question{close_quotes} are pertinent to all reactors.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (United States); Illinois Univ., Urbana, IL (United States). Dept. of Electrical and Computer Engineering
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-76DP00789
- OSTI ID:
- 10155949
- Report Number(s):
- SAND-92-7284; ON: DE93013498; TRN: 93:001304
- Resource Relation:
- Other Information: PBD: Sep 1992
- Country of Publication:
- United States
- Language:
- English
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