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Title: X-ray Microbeam Diffraction Measurements in Polycrystalline Aluminum and Copper Thin Films

Journal Article · · MRS Bull.
OSTI ID:1008698

Thermally induced residual strains in polycrystalline Cu and Al films on single crystal Si and glass substrates, respectively, have been examined on a grain-by-grain basis by x-ray microbeam diffraction. The crystallographic orientation and the deviatoric strain tensor, {var_epsilon}{sub ij}*, are determined for each grain by white beam Laue diffraction. From grain orientation mapping and strain tensor measurements, information is obtained about the distributions of strains for similarly oriented grains, about strain variations within single grains, and about grain-to-grain correlations of strains. This type of information may be useful in developing and testing theories for intergrain effects in strain evolution in polycrystals.

Research Organization:
Argonne National Lab. (ANL), Argonne, IL (United States). Advanced Photon Source (APS)
Sponsoring Organization:
USDOE
OSTI ID:
1008698
Journal Information:
MRS Bull., Vol. 795, Issue 03, 2004; ISSN 0883-7694
Country of Publication:
United States
Language:
ENGLISH