Introduction to applications and industries for Microelectromechanical Systems (MEMS).
Microelectromechanical Systems (MEMS) have gained acceptance as viable products for many commercial and government applications. MEMS are currently being used as displays for digital projection systems, sensors for airbag deployment systems, inkjet print head systems, and optical routers. This paper will discuss current and future MEMS applications. What are MEMS? MEMS are typically defined as microscopic devices designed, processed, and used to interact or produce changes within a local environment. A mechanical, electrical, or chemical stimulus can be used to create a mechanical, electrical, or chemical response in a local environment. These smaller, more sophisticated devices that think, act, sense, and communicate are replacing their bulk counterparts in many traditional applications.
- Research Organization:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1003919
- Report Number(s):
- SAND2003-2850C; TRN: US201103%%15
- Resource Relation:
- Conference: Proposed for presentation at the International Test Conference (ITC) held September 28-October 3, 2003 in Charlotte, NC.
- Country of Publication:
- United States
- Language:
- English
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