Depth Sectioning with the Aberration-Corrected Scanning Transmission Electron Microscope
Abstract
The ability to correct the aberrations of the probe-forming lens in the scanning transmission electron microscope provides not only a significant improvement in transverse resolution but in addition brings depth resolution at the nanometer scale. Aberration correction therefore opens up the possibility of 3D imaging by optical sectioning. Here we develop a definition for the depth resolution for scanning transmission electron microscope depth sectioning and present initial results from this method. Objects such as catalytic metal clusters and single atoms on various support materials are imaged in three dimensions with a resolution of several nanometers. Effective focal depth is determined by statistical analysis and the contributing factors are discussed. Finally, current challenges and future capabilities available through new instruments are discussed.
- Authors:
-
- ORNL
- Publication Date:
- Research Org.:
- Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC)
- OSTI Identifier:
- 1003507
- DOE Contract Number:
- DE-AC05-00OR22725
- Resource Type:
- Journal Article
- Journal Name:
- Proceedings of the National Academy of Sciences
- Additional Journal Information:
- Journal Volume: 103; Journal Issue: 9; Journal ID: ISSN 0027--8424
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION; ATOMS; DIMENSIONS; ELECTRON MICROSCOPES; RESOLUTION; GEOMETRICAL ABERRATIONS; TRANSMISSION ELECTRON MICROSCOPY; SCANNING ELECTRON MICROSCOPY
Citation Formats
Borisevich, Albina Y, Lupini, Andrew R, and Pennycook, Stephen J. Depth Sectioning with the Aberration-Corrected Scanning Transmission Electron Microscope. United States: N. p., 2006.
Web. doi:10.1073/pnas.0507105103.
Borisevich, Albina Y, Lupini, Andrew R, & Pennycook, Stephen J. Depth Sectioning with the Aberration-Corrected Scanning Transmission Electron Microscope. United States. https://doi.org/10.1073/pnas.0507105103
Borisevich, Albina Y, Lupini, Andrew R, and Pennycook, Stephen J. 2006.
"Depth Sectioning with the Aberration-Corrected Scanning Transmission Electron Microscope". United States. https://doi.org/10.1073/pnas.0507105103.
@article{osti_1003507,
title = {Depth Sectioning with the Aberration-Corrected Scanning Transmission Electron Microscope},
author = {Borisevich, Albina Y and Lupini, Andrew R and Pennycook, Stephen J},
abstractNote = {The ability to correct the aberrations of the probe-forming lens in the scanning transmission electron microscope provides not only a significant improvement in transverse resolution but in addition brings depth resolution at the nanometer scale. Aberration correction therefore opens up the possibility of 3D imaging by optical sectioning. Here we develop a definition for the depth resolution for scanning transmission electron microscope depth sectioning and present initial results from this method. Objects such as catalytic metal clusters and single atoms on various support materials are imaged in three dimensions with a resolution of several nanometers. Effective focal depth is determined by statistical analysis and the contributing factors are discussed. Finally, current challenges and future capabilities available through new instruments are discussed.},
doi = {10.1073/pnas.0507105103},
url = {https://www.osti.gov/biblio/1003507},
journal = {Proceedings of the National Academy of Sciences},
issn = {0027--8424},
number = 9,
volume = 103,
place = {United States},
year = {Sun Jan 01 00:00:00 EST 2006},
month = {Sun Jan 01 00:00:00 EST 2006}
}