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Title: Depth Sectioning with the Aberration-Corrected Scanning Transmission Electron Microscope

Abstract

The ability to correct the aberrations of the probe-forming lens in the scanning transmission electron microscope provides not only a significant improvement in transverse resolution but in addition brings depth resolution at the nanometer scale. Aberration correction therefore opens up the possibility of 3D imaging by optical sectioning. Here we develop a definition for the depth resolution for scanning transmission electron microscope depth sectioning and present initial results from this method. Objects such as catalytic metal clusters and single atoms on various support materials are imaged in three dimensions with a resolution of several nanometers. Effective focal depth is determined by statistical analysis and the contributing factors are discussed. Finally, current challenges and future capabilities available through new instruments are discussed.

Authors:
 [1];  [1];  [1]
  1. ORNL
Publication Date:
Research Org.:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Org.:
USDOE Office of Science (SC)
OSTI Identifier:
1003507
DOE Contract Number:  
DE-AC05-00OR22725
Resource Type:
Journal Article
Journal Name:
Proceedings of the National Academy of Sciences
Additional Journal Information:
Journal Volume: 103; Journal Issue: 9; Journal ID: ISSN 0027--8424
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION; ATOMS; DIMENSIONS; ELECTRON MICROSCOPES; RESOLUTION; GEOMETRICAL ABERRATIONS; TRANSMISSION ELECTRON MICROSCOPY; SCANNING ELECTRON MICROSCOPY

Citation Formats

Borisevich, Albina Y, Lupini, Andrew R, and Pennycook, Stephen J. Depth Sectioning with the Aberration-Corrected Scanning Transmission Electron Microscope. United States: N. p., 2006. Web. doi:10.1073/pnas.0507105103.
Borisevich, Albina Y, Lupini, Andrew R, & Pennycook, Stephen J. Depth Sectioning with the Aberration-Corrected Scanning Transmission Electron Microscope. United States. https://doi.org/10.1073/pnas.0507105103
Borisevich, Albina Y, Lupini, Andrew R, and Pennycook, Stephen J. 2006. "Depth Sectioning with the Aberration-Corrected Scanning Transmission Electron Microscope". United States. https://doi.org/10.1073/pnas.0507105103.
@article{osti_1003507,
title = {Depth Sectioning with the Aberration-Corrected Scanning Transmission Electron Microscope},
author = {Borisevich, Albina Y and Lupini, Andrew R and Pennycook, Stephen J},
abstractNote = {The ability to correct the aberrations of the probe-forming lens in the scanning transmission electron microscope provides not only a significant improvement in transverse resolution but in addition brings depth resolution at the nanometer scale. Aberration correction therefore opens up the possibility of 3D imaging by optical sectioning. Here we develop a definition for the depth resolution for scanning transmission electron microscope depth sectioning and present initial results from this method. Objects such as catalytic metal clusters and single atoms on various support materials are imaged in three dimensions with a resolution of several nanometers. Effective focal depth is determined by statistical analysis and the contributing factors are discussed. Finally, current challenges and future capabilities available through new instruments are discussed.},
doi = {10.1073/pnas.0507105103},
url = {https://www.osti.gov/biblio/1003507}, journal = {Proceedings of the National Academy of Sciences},
issn = {0027--8424},
number = 9,
volume = 103,
place = {United States},
year = {Sun Jan 01 00:00:00 EST 2006},
month = {Sun Jan 01 00:00:00 EST 2006}
}