Quantitative phase retrieval with arbitrary pupil and illumination
Abstract
We present a general algorithm for combining measurements taken under various illumination and imaging conditions to quantitatively extract the amplitude and phase of an object wave. The algorithm uses the weak object transfer function, which incorporates arbitrary pupil functions and partially coherent illumination. The approach is extended beyond the weak object regime using an iterative algorithm. We demonstrate the method on measurements of Extreme Ultraviolet Lithography (EUV) multilayer mask defects taken in an EUV zone plate microscope with both a standard zone plate lens and a zone plate implementing Zernike phase contrast.
- Authors:
-
- Univ. of California, Berkeley, CA (United States)
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Publication Date:
- Research Org.:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC); USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22). Materials Sciences & Engineering Division
- OSTI Identifier:
- 1253994
- Alternate Identifier(s):
- OSTI ID: 1466689
- Grant/Contract Number:
- AC02-05CH11231
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Optics Express
- Additional Journal Information:
- Journal Volume: 23; Journal Issue: 20; Journal ID: ISSN 1094-4087
- Publisher:
- Optical Society of America (OSA)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 97 MATHEMATICS AND COMPUTING; computational imaging; phase retrieval; Im-age reconstruction techniques
Citation Formats
Claus, Rene A., Naulleau, Patrick P., Neureuther, Andrew R., and Waller, Laura. Quantitative phase retrieval with arbitrary pupil and illumination. United States: N. p., 2015.
Web. doi:10.1364/OE.23.026672.
Claus, Rene A., Naulleau, Patrick P., Neureuther, Andrew R., & Waller, Laura. Quantitative phase retrieval with arbitrary pupil and illumination. United States. https://doi.org/10.1364/OE.23.026672
Claus, Rene A., Naulleau, Patrick P., Neureuther, Andrew R., and Waller, Laura. Fri .
"Quantitative phase retrieval with arbitrary pupil and illumination". United States. https://doi.org/10.1364/OE.23.026672. https://www.osti.gov/servlets/purl/1253994.
@article{osti_1253994,
title = {Quantitative phase retrieval with arbitrary pupil and illumination},
author = {Claus, Rene A. and Naulleau, Patrick P. and Neureuther, Andrew R. and Waller, Laura},
abstractNote = {We present a general algorithm for combining measurements taken under various illumination and imaging conditions to quantitatively extract the amplitude and phase of an object wave. The algorithm uses the weak object transfer function, which incorporates arbitrary pupil functions and partially coherent illumination. The approach is extended beyond the weak object regime using an iterative algorithm. We demonstrate the method on measurements of Extreme Ultraviolet Lithography (EUV) multilayer mask defects taken in an EUV zone plate microscope with both a standard zone plate lens and a zone plate implementing Zernike phase contrast.},
doi = {10.1364/OE.23.026672},
journal = {Optics Express},
number = 20,
volume = 23,
place = {United States},
year = {Fri Oct 02 00:00:00 EDT 2015},
month = {Fri Oct 02 00:00:00 EDT 2015}
}
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Works referenced in this record:
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Works referencing / citing this record:
Isotropic differential phase contrast microscopy for quantitative phase bio-imaging
journal, May 2018
- Chen, Hsi-Hsun; Lin, Yu-Zi; Luo, Yuan
- Journal of Biophotonics, Vol. 11, Issue 8
3D differential phase contrast microscopy
journal, January 2016
- Chen, Michael; Tian, Lei; Waller, Laura
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Motion-resolved quantitative phase imaging
journal, January 2018
- Kellman, Michael; Chen, Michael; Phillips, Zachary F.
- Biomedical Optics Express, Vol. 9, Issue 11
Quantitative phase imaging and complex field reconstruction by pupil modulation differential phase contrast
journal, January 2016
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- Optics Express, Vol. 24, Issue 22
Single-exposure quantitative phase imaging in color-coded LED microscopy
journal, January 2017
- Lee, Wonchan; Jung, Daeseong; Ryu, Suho
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Quantitative differential phase contrast (DPC) microscopy with computational aberration correction
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Single-shot quantitative phase microscopy with color-multiplexed differential phase contrast (cDPC)
journal, February 2017
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