A High-Precision Instrument for Mapping of Rotational Errors in Rotary Stages
Abstract
A rotational stage is a key component of every X-ray instrument capable of providing tomographic or diffraction measurements. To perform accurate three-dimensional reconstructions, runout errors due to imperfect rotation (e.g. circle of confusion) must be quantified and corrected. A dedicated instrument capable of full characterization and circle of confusion mapping in rotary stages down to the sub-10 nm level has been developed. A high-stability design, with an array of five capacitive sensors, allows simultaneous measurements of wobble, radial and axial displacements. The developed instrument has been used for characterization of two mechanical stages which are part of an X-ray microscope.
- Authors:
- Publication Date:
- Research Org.:
- Brookhaven National Lab. (BNL), Upton, NY (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC)
- OSTI Identifier:
- 1174100
- Report Number(s):
- BNL-107387-2015-JA
Journal ID: ISSN 1600-5775; R&D Project: LS001
- Grant/Contract Number:
- SC00112704
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Journal of Synchrotron Radiation (Online)
- Additional Journal Information:
- Journal Name: Journal of Synchrotron Radiation (Online); Journal Volume: 21; Journal Issue: 6; Journal ID: ISSN 1600-5775
- Publisher:
- International Union of Crystallography
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; high-precision instrument; rotational errors; rotary stages
Citation Formats
Xu, W., Lauer, K., Chu, Y., and Nazaretski, E. A High-Precision Instrument for Mapping of Rotational Errors in Rotary Stages. United States: N. p., 2014.
Web. doi:10.1107/S160057751401618X.
Xu, W., Lauer, K., Chu, Y., & Nazaretski, E. A High-Precision Instrument for Mapping of Rotational Errors in Rotary Stages. United States. https://doi.org/10.1107/S160057751401618X
Xu, W., Lauer, K., Chu, Y., and Nazaretski, E. Sun .
"A High-Precision Instrument for Mapping of Rotational Errors in Rotary Stages". United States. https://doi.org/10.1107/S160057751401618X. https://www.osti.gov/servlets/purl/1174100.
@article{osti_1174100,
title = {A High-Precision Instrument for Mapping of Rotational Errors in Rotary Stages},
author = {Xu, W. and Lauer, K. and Chu, Y. and Nazaretski, E.},
abstractNote = {A rotational stage is a key component of every X-ray instrument capable of providing tomographic or diffraction measurements. To perform accurate three-dimensional reconstructions, runout errors due to imperfect rotation (e.g. circle of confusion) must be quantified and corrected. A dedicated instrument capable of full characterization and circle of confusion mapping in rotary stages down to the sub-10 nm level has been developed. A high-stability design, with an array of five capacitive sensors, allows simultaneous measurements of wobble, radial and axial displacements. The developed instrument has been used for characterization of two mechanical stages which are part of an X-ray microscope.},
doi = {10.1107/S160057751401618X},
journal = {Journal of Synchrotron Radiation (Online)},
number = 6,
volume = 21,
place = {United States},
year = {Sun Nov 02 00:00:00 EDT 2014},
month = {Sun Nov 02 00:00:00 EDT 2014}
}
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Works referencing / citing this record:
A rotational and axial motion system load frame insert for in situ high energy x-ray studies
journal, September 2015
- Shade, Paul A.; Blank, Basil; Schuren, Jay C.
- Review of Scientific Instruments, Vol. 86, Issue 9
Design, characterization, and performance of a hard x-ray transmission microscope at the National Synchrotron Light Source II 18-ID beamline
journal, May 2019
- Coburn, David Scott; Nazaretski, Evgeny; Xu, Weihe
- Review of Scientific Instruments, Vol. 90, Issue 5
High-speed raster-scanning synchrotron serial microcrystallography with a high-precision piezo-scanner
text, January 2018
- Gao, Yuan; Xu, Weihe; Shi, Wuxian
- International Union of Crystallography (IUCr)
A rotational and axial motion system load frame insert for in situ high energy x-ray studies
text, January 2015
- Shade, Paul A.; Blank, Basil; Schuren, Jay C.
- Deutsches Elektronen-Synchrotron, DESY, Hamburg