Rutherford forward scattering and elastic recoil detection (RFSERD) as a method for characterizing ultra-thin films

Lohn, Andrew J.; Doyle, Barney L.; Stein, Gregory J.; Mickel, Patrick R.; Stevens, Jim E.; Marinella, Matthew J.

doi:10.1016/j.nimb.2014.02.038

Title: Rutherford forward scattering and elastic recoil detection (RFSERD) as a method for characterizing ultra-thin films

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Abstract

We present a novel ion beam analysis technique combining Rutherford forward scattering and elastic recoil detection (RFSERD) and demonstrate its ability to increase efficiency in determining stoichiometry in ultrathin (5-50 nm) films as compared to Rutherford backscattering. In the conventional forward geometries, scattering from the substrate overwhelms the signal from light atoms but in RFSERD, scattered ions from the substrate are ranged out while forward scattered ions and recoiled atoms from the thin film are simultaneously detected in a single detector. Lastly, the technique is applied to tantalum oxide memristors but can be extended to a wide range of materials systems.

Authors:

Lohn, Andrew J. ^[1]; Doyle, Barney L. ^[1]; Stein, Gregory J. ^[1]; Mickel, Patrick R. ^[1]; Stevens, Jim E. ^[1]; Marinella, Matthew J. ^[1]

Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Publication Date:: Thu Apr 03 00:00:00 EDT 2014

Research Org.:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Org.:: USDOE National Nuclear Security Administration (NNSA)

OSTI Identifier:: 1106565

Report Number(s):: SAND2013-5614J
Journal ID: ISSN 0168-583X; PII: S0168583X1400295X

Grant/Contract Number:: AC0494AL85000

Resource Type:: Accepted Manuscript

Journal Name:: Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms

Additional Journal Information:: Journal Volume: 332; Related Information: Proposed for publication in Nuclear Instruments and Methods.; Journal ID: ISSN 0168-583X

Publisher:: Elsevier

Country of Publication:: United States

Language:: English

Subject:: 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; Thin films; Memristor; RRAM; Rutherford forward scattering; Elastic recoil detection

Citation Formats


                    Lohn, Andrew J., Doyle, Barney L., Stein, Gregory J., Mickel, Patrick R., Stevens, Jim E., and Marinella, Matthew J. Rutherford forward scattering and elastic recoil detection (RFSERD) as a method for characterizing ultra-thin films.  United States: N. p., 2014. 
Web.  doi:10.1016/j.nimb.2014.02.038.

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                    Lohn, Andrew J., Doyle, Barney L., Stein, Gregory J., Mickel, Patrick R., Stevens, Jim E., & Marinella, Matthew J. Rutherford forward scattering and elastic recoil detection (RFSERD) as a method for characterizing ultra-thin films.  United States.  https://doi.org/10.1016/j.nimb.2014.02.038

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                    Lohn, Andrew J., Doyle, Barney L., Stein, Gregory J., Mickel, Patrick R., Stevens, Jim E., and Marinella, Matthew J. Thu .  
"Rutherford forward scattering and elastic recoil detection (RFSERD) as a method for characterizing ultra-thin films".  United States.  https://doi.org/10.1016/j.nimb.2014.02.038.  https://www.osti.gov/servlets/purl/1106565.

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@article{osti_1106565,

  title        = {Rutherford forward scattering and elastic recoil detection (RFSERD) as a method for characterizing ultra-thin films},

  author       = {Lohn, Andrew J. and Doyle, Barney L. and Stein, Gregory J. and Mickel, Patrick R. and Stevens, Jim E. and Marinella, Matthew J.},

  abstractNote = {We present a novel ion beam analysis technique combining Rutherford forward scattering and elastic recoil detection (RFSERD) and demonstrate its ability to increase efficiency in determining stoichiometry in ultrathin (5-50 nm) films as compared to Rutherford backscattering. In the conventional forward geometries, scattering from the substrate overwhelms the signal from light atoms but in RFSERD, scattered ions from the substrate are ranged out while forward scattered ions and recoiled atoms from the thin film are simultaneously detected in a single detector. Lastly, the technique is applied to tantalum oxide memristors but can be extended to a wide range of materials systems.},

  doi          = {10.1016/j.nimb.2014.02.038},

  journal      = {Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms},

  number       = ,

  volume       = 332,

  place        = {United States},

  year         = {Thu Apr 03 00:00:00 EDT 2014},

  month        = {Thu Apr 03 00:00:00 EDT 2014}

}

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