DOE PAGES title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Multiply-excited states and their contribution to opacity in CO2 laser-driven tin-plasma conditions

Abstract

A recent study (2020 Nat. Commun. 11 2334) has found that transitions between multiply-excited configurations in open 4d-subshell tin ions are the dominant contributors to intense EUV emission from dense, Nd:YAG-driven (laser wavelength λ = 1.064 μm) tin plasmas. In the present study, we employ the Los Alamos Atomic code to investigate the spectral contribution from these transitions under industrially-relevant, CO2 laser-driven (λ = 10.6 μm) tin plasma conditions. First, we employ Busquet's ionisation temperature method to match the average charge state < Z > of a non-local-thermodynamic equilibrium (non-LTE) plasma with an LTE one. This is done by varying the temperature of the LTE calculations until a so-called ionisation temperature TZ is established. Importantly, this approach generates LTE-computed configuration populations in excellent agreement with the non-LTE populations. A corollary of this observation is that the non-LTE populations are well-described by Boltzmann-type exponential distributions having effective temperatures Teff ≈ TZ. In the second part of this work, we perform extensive level-resolved LTE opacity calculations at TZ. It is found that 66% of the opacity in the industrially-relevant 2% bandwidth centred at 13.5 nm arises from transitions between multiply-excited states. These results reinforce the need for the consideration of complex, multiply-excitedmore » states in modelling the radiative properties of laser-driven plasma sources of EUV light.« less

Authors:
ORCiD logo [1]; ORCiD logo [2]; ORCiD logo [3]; ORCiD logo [3]
  1. Advanced Research Center for Nanolithography, Amsterdam (The Netherlands)
  2. Advanced Research Center for Nanolithography, Amsterdam (The Netherlands); Vrije Univ., Amsterdam (The Netherlands)
  3. Los Alamos National Lab. (LANL), Los Alamos, NM (United States)
Publication Date:
Research Org.:
Los Alamos National Lab. (LANL), Los Alamos, NM (United States)
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA); European Research Council (ERC)
OSTI Identifier:
1787292
Report Number(s):
LA-UR-20-26756
Journal ID: ISSN 0953-4075; TRN: US2210437
Grant/Contract Number:  
89233218CNA000001; 802648
Resource Type:
Accepted Manuscript
Journal Name:
Journal of Physics. B, Atomic, Molecular and Optical Physics
Additional Journal Information:
Journal Volume: 54; Journal Issue: 3; Journal ID: ISSN 0953-4075
Publisher:
IOP Publishing
Country of Publication:
United States
Language:
English
Subject:
74 ATOMIC AND MOLECULAR PHYSICS; opacity; non-LTE; effective temperature; multiply-excited states

Citation Formats

Sheil, John, Versolato, Oscar O., Neukirch, Amanda J., and Colgan, James Patrick. Multiply-excited states and their contribution to opacity in CO2 laser-driven tin-plasma conditions. United States: N. p., 2021. Web. doi:10.1088/1361-6455/abcedf.
Sheil, John, Versolato, Oscar O., Neukirch, Amanda J., & Colgan, James Patrick. Multiply-excited states and their contribution to opacity in CO2 laser-driven tin-plasma conditions. United States. https://doi.org/10.1088/1361-6455/abcedf
Sheil, John, Versolato, Oscar O., Neukirch, Amanda J., and Colgan, James Patrick. Fri . "Multiply-excited states and their contribution to opacity in CO2 laser-driven tin-plasma conditions". United States. https://doi.org/10.1088/1361-6455/abcedf. https://www.osti.gov/servlets/purl/1787292.
@article{osti_1787292,
title = {Multiply-excited states and their contribution to opacity in CO2 laser-driven tin-plasma conditions},
author = {Sheil, John and Versolato, Oscar O. and Neukirch, Amanda J. and Colgan, James Patrick},
abstractNote = {A recent study (2020 Nat. Commun. 11 2334) has found that transitions between multiply-excited configurations in open 4d-subshell tin ions are the dominant contributors to intense EUV emission from dense, Nd:YAG-driven (laser wavelength λ = 1.064 μm) tin plasmas. In the present study, we employ the Los Alamos Atomic code to investigate the spectral contribution from these transitions under industrially-relevant, CO2 laser-driven (λ = 10.6 μm) tin plasma conditions. First, we employ Busquet's ionisation temperature method to match the average charge state < Z > of a non-local-thermodynamic equilibrium (non-LTE) plasma with an LTE one. This is done by varying the temperature of the LTE calculations until a so-called ionisation temperature TZ is established. Importantly, this approach generates LTE-computed configuration populations in excellent agreement with the non-LTE populations. A corollary of this observation is that the non-LTE populations are well-described by Boltzmann-type exponential distributions having effective temperatures Teff ≈ TZ. In the second part of this work, we perform extensive level-resolved LTE opacity calculations at TZ. It is found that 66% of the opacity in the industrially-relevant 2% bandwidth centred at 13.5 nm arises from transitions between multiply-excited states. These results reinforce the need for the consideration of complex, multiply-excited states in modelling the radiative properties of laser-driven plasma sources of EUV light.},
doi = {10.1088/1361-6455/abcedf},
journal = {Journal of Physics. B, Atomic, Molecular and Optical Physics},
number = 3,
volume = 54,
place = {United States},
year = {Fri Jan 22 00:00:00 EST 2021},
month = {Fri Jan 22 00:00:00 EST 2021}
}

Works referenced in this record:

An equation of state for partially ionized plasmas: The Coulomb contribution to the free energy
journal, September 2015


Opacity of neutral and low ion stages of Sn at the wavelength 13.5 nm used in extreme-ultraviolet lithography
journal, July 2005


Prominent radiative contributions from multiply-excited states in laser-produced tin plasma for nanolithography
journal, May 2020


Spectra of W VIII and W IX in the EUV Region
journal, June 2015

  • Ryabtsev, Alexander; Kononov, Edward; Kildiyarova, Rimma
  • Atoms, Vol. 3, Issue 3
  • DOI: 10.3390/atoms3030273

Modeling of EUV emission from xenon and tin plasma sources for nanolithography
journal, May 2006

  • Poirier, M.; Blenski, T.; de Gaufridy de Dortan, F.
  • Journal of Quantitative Spectroscopy and Radiative Transfer, Vol. 99, Issue 1-3
  • DOI: 10.1016/j.jqsrt.2005.05.038

Modeling of radiative properties of Sn plasmas for extreme-ultraviolet source
journal, June 2010

  • Sasaki, Akira; Sunahara, Atsushi; Furukawa, Hiroyuki
  • Journal of Applied Physics, Vol. 107, Issue 11
  • DOI: 10.1063/1.3373427

Light sources for high-volume manufacturing EUV lithography: technology, performance, and power scaling
journal, January 2017

  • Fomenkov, Igor; Brandt, David; Ershov, Alex
  • Advanced Optical Technologies, Vol. 6, Issue 3-4
  • DOI: 10.1515/aot-2017-0029

Temperatures in non-LTE hot plasmas
journal, March 2000

  • Bauche, J.; Bauche-Arnoult, C.
  • Journal of Physics B: Atomic, Molecular and Optical Physics, Vol. 33, Issue 8
  • DOI: 10.1088/0953-4075/33/8/101

Configuration interaction in charge exchange spectra of tin and xenon
journal, June 2011


Soft X-ray tomography and cryogenic light microscopy: the cool combination in cellular imaging
journal, November 2009

  • McDermott, Gerry; Le Gros, Mark A.; Knoechel, Christian G.
  • Trends in Cell Biology, Vol. 19, Issue 11
  • DOI: 10.1016/j.tcb.2009.08.005

Rb-like spectra: Pd x to Nd xxiv
journal, January 1992

  • Sugar, J.; Rowan, W. L.; Kaufman, V.
  • Journal of the Optical Society of America B, Vol. 9, Issue 11
  • DOI: 10.1364/josab.9.001959

Radiation-hydrodynamics, spectral, and atomic physics modeling of laser-produced plasma EUVL light sources
conference, May 2005

  • MacFarlane, J. J.; Rettig, C. L.; Wang, P.
  • Microlithography 2005, SPIE Proceedings
  • DOI: 10.1117/12.600295

Atomic structure considerations for the low-temperature opacity of Sn
journal, June 2017


The effect of an ambient radiation field on the state of ionization in a laser-produced plasma
journal, July 1995


Checking the validity of Busquet's ionization temperature with detailed collisional radiative models
journal, October 1997

  • Klapisch, M.; Bar-Shalom, A.
  • Journal of Quantitative Spectroscopy and Radiative Transfer, Vol. 58, Issue 4-6
  • DOI: 10.1016/s0022-4073(97)00074-5

Effective temperatures in hot dense plasmas
journal, May 2006

  • Bauche, J.; Bauche-Arnoult, C.; Peyrusse, O.
  • Journal of Quantitative Spectroscopy and Radiative Transfer, Vol. 99, Issue 1-3
  • DOI: 10.1016/j.jqsrt.2005.05.003

Nanoscale X-ray imaging
journal, December 2010


EUV spectroscopy of highly charged Sn 13 + Sn 15 + ions in an electron-beam ion trap
journal, June 2020


Perspective: Towards single shot time-resolved microscopy using short wavelength table-top light sources
journal, January 2019

  • Helk, T.; Zürch, M.; Spielmann, C.
  • Structural Dynamics, Vol. 6, Issue 1
  • DOI: 10.1063/1.5082686

Collisional-Radiative Modeling for Highly-Charged Ions of Tungsten
journal, January 2013


Cowan Code: 50 Years of Growing Impact on Atomic Physics
journal, July 2019


Analysis of the spectra of In XII–XIV and Sn XIII–XV in the far-VUV region
journal, August 2006


Physics of laser-driven tin plasma sources of EUV radiation for nanolithography
journal, August 2019


Detailed investigations on radiative opacity and emissivity of tin plasmas in the extreme-ultraviolet region
journal, August 2010


Statistics and characteristics of xuv transition arrays from laser-produced plasmas of the elements tin through iodine
journal, November 1994


Evidence for a temperature law in non-LTE hot plasmas
journal, October 2000

  • Fournier, K. B.; Bauche, J.; Bauche-Arnoult, C.
  • Journal of Physics B: Atomic, Molecular and Optical Physics, Vol. 33, Issue 21
  • DOI: 10.1088/0953-4075/33/21/329

Detailed atomic modeling of Sn plasmas for the EUV source
journal, May 2008


Improvements to the RADIOM non-LTE model
journal, December 2009


Analysis of the fine structure of Sn 11 + Sn 14 + ions by optical spectroscopy in an electron-beam ion trap
journal, July 2016


Radiation‐dependent ionization model for laser‐created plasmas
journal, November 1993

  • Busquet, M.
  • Physics of Fluids B: Plasma Physics, Vol. 5, Issue 11
  • DOI: 10.1063/1.860586

Onset of pseudo-thermal equilibrium within configurations and super-configurations
journal, May 2006


Resonance lines 4p^6–4p^54d of the Kr i isoelectronic sequence
journal, January 1991

  • Sugar, Jack; Rowan, William L.; Kaufman, Victor
  • Journal of the Optical Society of America B, Vol. 8, Issue 10
  • DOI: 10.1364/josab.8.002026

Radiative properties for astrophysical plasma mixtures in nonlocal thermodynamic equilibrium
journal, September 2018


Atomic modeling of the plasma EUV sources
journal, May 2007

  • Sasaki, Akira; Sunahara, Atsushi; Nishihara, Katsunobu
  • High Energy Density Physics, Vol. 3, Issue 1-2
  • DOI: 10.1016/j.hedp.2007.02.031

Simplified modeling of 13.5 nm unresolved transition array emission of a Sn plasma and comparison with experiment
journal, December 2005

  • White, J.; Hayden, P.; Dunne, P.
  • Journal of Applied Physics, Vol. 98, Issue 11
  • DOI: 10.1063/1.2128055

Integral and differential cross sections for electron impact ionization
journal, November 1991

  • Clark, R. E. H.; Abdallah, J. , Jr.; Mann, J. B.
  • The Astrophysical Journal, Vol. 381
  • DOI: 10.1086/170685

Lithography gets extreme
journal, January 2010


Spectra of rubidium-like Pd X-Sn XIV ions
journal, December 2008

  • Ryabtsev, A. N.; Kononov, É. Ya.; Churilov, S. S.
  • Optics and Spectroscopy, Vol. 105, Issue 6
  • DOI: 10.1134/s0030400x08120060

4d–4f emission resonances in laser-produced plasmas
journal, January 1981

  • O’Sullivan, G.; Carroll, P. K.
  • Journal of the Optical Society of America, Vol. 71, Issue 3
  • DOI: 10.1364/josa.71.000227

Spectroscopy of highly charged ions and its relevance to EUV and soft x-ray source development
journal, May 2015

  • O’Sullivan, Gerry; Li, Bowen; D’Arcy, Rebekah
  • Journal of Physics B: Atomic, Molecular and Optical Physics, Vol. 48, Issue 14
  • DOI: 10.1088/0953-4075/48/14/144025

Industrialization of a robust EUV source for high-volume manufacturing and power scaling beyond 250W
conference, May 2018

  • Fomenkov, Igor V.; Schafgans, Alexander A.; Tao, Yezheng
  • Extreme Ultraviolet (EUV) Lithography IX
  • DOI: 10.1117/12.2305955

The new Los Alamos opacity code ATOMIC
journal, May 2006

  • Hakel, P.; Sherrill, M. E.; Mazevet, S.
  • Journal of Quantitative Spectroscopy and Radiative Transfer, Vol. 99, Issue 1-3
  • DOI: 10.1016/j.jqsrt.2005.04.007

Relativistic calculations for highly correlated atomic and highly charged ionic systems
journal, March 2007


Laser-plasma EUV source dedicated for surface processing of polymers
journal, August 2011

  • Bartnik, A.; Fiedorowicz, H.; Jarocki, R.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 647, Issue 1
  • DOI: 10.1016/j.nima.2011.05.033

CHEMEOS: A New Chemical-Picture-Based Model for Plasma Equation-of-State Calculations
conference, January 2004

  • Hakel, Peter
  • ATOMIC PROCESSES IN PLASMAS: 14th APS Topical Conference on Atomic Processes in Plasmas, AIP Conference Proceedings
  • DOI: 10.1063/1.1824870

Influence of configuration interaction on satellite lines of xenon and tin in the EUV region
journal, January 2007

  • Dortan, F. de Gaufridy de
  • Journal of Physics B: Atomic, Molecular and Optical Physics, Vol. 40, Issue 3
  • DOI: 10.1088/0953-4075/40/3/015

High conversion efficiency mass-limited Sn-based laser plasma source for extreme ultraviolet lithography
journal, January 2004

  • Richardson, M.; Koay, C. -S.; Takenoshita, K.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 22, Issue 2
  • DOI: 10.1116/1.1667511

Lithography for enabling advances in integrated circuits and devices
journal, August 2012

  • Garner, C. Michael
  • Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences, Vol. 370, Issue 1973
  • DOI: 10.1098/rsta.2011.0052

Analyses of the Sn IX–Sn XII spectra in the EUV region
journal, May 2006


Interpretation of the quasicontinuum band emitted by highly ionized rare-earth elements in the 70–100 - Å range
journal, June 1987


Three-dimensional cellular ultrastructure resolved by X-ray microscopy
journal, November 2010

  • Schneider, Gerd; Guttmann, Peter; Heim, Stefan
  • Nature Methods, Vol. 7, Issue 12
  • DOI: 10.1038/nmeth.1533

EUV emission spectra in collisions of multiply charged Sn ions with He and Xe
journal, March 2010

  • Ohashi, H.; Suda, S.; Tanuma, H.
  • Journal of Physics B: Atomic, Molecular and Optical Physics, Vol. 43, Issue 6
  • DOI: 10.1088/0953-4075/43/6/065204

The Los Alamos suite of relativistic atomic physics codes
journal, May 2015

  • Fontes, C. J.; Zhang, H. L.; Jr, J. Abdallah
  • Journal of Physics B: Atomic, Molecular and Optical Physics, Vol. 48, Issue 14
  • DOI: 10.1088/0953-4075/48/14/144014

Los Alamos Opacities: Transition from LEDCOP to ATOMIC
conference, January 2004

  • Magee, N. H.
  • ATOMIC PROCESSES IN PLASMAS: 14th APS Topical Conference on Atomic Processes in Plasmas, AIP Conference Proceedings
  • DOI: 10.1063/1.1824868

Optical spectroscopy of complex open- 4 d -shell ions Sn 7 + Sn 10 +
journal, April 2017


Transitions and the effects of configuration interaction in the spectra of Sn XV–Sn XVIII
journal, April 2009