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This content will become publicly available on November 4, 2017

Title: Impact of deposition-rate fluctuations on thin-film thickness and uniformity

Authors:
Publication Date:
OSTI Identifier:
1330734
Grant/Contract Number:
NA0001944
Type:
Publisher's Accepted Manuscript
Journal Name:
Optics Letters
Additional Journal Information:
Journal Volume: 41; Journal Issue: 22; Related Information: CHORUS Timestamp: 2016-11-02 15:09:58; Journal ID: ISSN 0146-9592
Publisher:
Optical Society of America
Sponsoring Org:
USDOE National Nuclear Security Administration (NNSA)
Country of Publication:
United States
Language:
English