Study of defect structures in 6H-SiC a/m-plane pseudofiber crystals grown by hot-wall CVD epitaxy

Goue, Ouloide Y.; Raghothamachar, Balaji; Yang, Yu; Guo, Jianqiu; Dudley, Michael; Kisslinger, Kim; Trunek, Andrew J.; Neudeck, Philip G.; Spry, David J.; Woodworth, Andrew A.

doi:10.1007/s11664-015-4185-7

Title: Study of defect structures in 6H-SiC a/m-plane pseudofiber crystals grown by hot-wall CVD epitaxy

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Abstract

Structural perfection of silicon carbide (SiC) single crystals is essential to achieve high-performance power devices. A new bulk growth process for SiC proposed by researchers at NASA Glenn Research Center, called large tapered crystal (LTC) growth, based on axial fiber growth followed by lateral expansion, could produce SiC boules with potentially as few as one threading screw dislocation per wafer. In this study, the lateral expansion aspect of LTC growth is addressed through analysis of lateral growth of 6H-SiC a/m-plane seed crystals by hot-wall chemical vapor deposition. Preliminary synchrotron white-beam x-ray topography (SWBXT) indicates that the as-grown boules match the polytype structure of the underlying seed and have a faceted hexagonal morphology with a strain-free surface marked by steps. SWBXT Laue diffraction patterns of transverse and axial slices of the boules reveal streaks suggesting the existence of stacking faults/polytypes, and this is confirmed by micro-Raman spectroscopy. Transmission x-ray topography of both transverse and axial slices reveals inhomogeneous strains at the seed–epilayer interface and linear features propagating from the seed along the growth direction. Micro-Raman mapping of an axial slice reveals that the seed contains high stacking disorder, while contrast extinction analysis (g·b and g·b×l) of the linear features reveals thatmore »« less

Authors:

Goue, Ouloide Y. ^[1]; Raghothamachar, Balaji ^[1]; Yang, Yu ^[1]; Guo, Jianqiu ^[1]; Dudley, Michael ^[1]; Kisslinger, Kim ^[2]; Trunek, Andrew J. ^[3]; Neudeck, Philip G. ^[3]; Spry, David J. ^[3]; Woodworth, Andrew A. ^[3]

Stony Brook Univ., Stony Brook, NY (United States)
Brookhaven National Lab. (BNL), Upton, NY (United States)
NASA Glenn Research Center, Cleveland, OH (United States)

Publication Date:: Wed Nov 25 00:00:00 EST 2015

Research Org.:: Brookhaven National Lab. (BNL), Upton, NY (United States). Center for Functional Nanomaterials (CFN)

Sponsoring Org.:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

OSTI Identifier:: 1328371

Report Number(s):: BNL-112675-2016-JA
Journal ID: ISSN 0361-5235; KC0403020

Grant/Contract Number:: SC00112704

Resource Type:: Accepted Manuscript

Journal Name:: Journal of Electronic Materials

Additional Journal Information:: Journal Volume: 45; Journal Issue: 4; Journal ID: ISSN 0361-5235

Publisher:: Springer

Country of Publication:: United States

Language:: English

Subject:: 77 NANOSCIENCE AND NANOTECHNOLOGY; Center for Functional Nanomaterials; silicon carbide; large tapered crystal; lateral expansion; hot-wall chemical vapor; deposition; x-ray topography; stacking faults

Citation Formats


                    Goue, Ouloide Y., Raghothamachar, Balaji, Yang, Yu, Guo, Jianqiu, Dudley, Michael, Kisslinger, Kim, Trunek, Andrew J., Neudeck, Philip G., Spry, David J., and Woodworth, Andrew A. Study of defect structures in 6H-SiC a/m-plane pseudofiber crystals grown by hot-wall CVD epitaxy.  United States: N. p., 2015. 
Web.  doi:10.1007/s11664-015-4185-7.

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                    Goue, Ouloide Y., Raghothamachar, Balaji, Yang, Yu, Guo, Jianqiu, Dudley, Michael, Kisslinger, Kim, Trunek, Andrew J., Neudeck, Philip G., Spry, David J., & Woodworth, Andrew A. Study of defect structures in 6H-SiC a/m-plane pseudofiber crystals grown by hot-wall CVD epitaxy.  United States.  https://doi.org/10.1007/s11664-015-4185-7

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                    Goue, Ouloide Y., Raghothamachar, Balaji, Yang, Yu, Guo, Jianqiu, Dudley, Michael, Kisslinger, Kim, Trunek, Andrew J., Neudeck, Philip G., Spry, David J., and Woodworth, Andrew A. Wed .  
"Study of defect structures in 6H-SiC a/m-plane pseudofiber crystals grown by hot-wall CVD epitaxy".  United States.  https://doi.org/10.1007/s11664-015-4185-7.  https://www.osti.gov/servlets/purl/1328371.

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@article{osti_1328371,

  title        = {Study of defect structures in 6H-SiC a/m-plane pseudofiber crystals grown by hot-wall CVD epitaxy},

  author       = {Goue, Ouloide Y. and Raghothamachar, Balaji and Yang, Yu and Guo, Jianqiu and Dudley, Michael and Kisslinger, Kim and Trunek, Andrew J. and Neudeck, Philip G. and Spry, David J. and Woodworth, Andrew A.},

  abstractNote = {Structural perfection of silicon carbide (SiC) single crystals is essential to achieve high-performance power devices. A new bulk growth process for SiC proposed by researchers at NASA Glenn Research Center, called large tapered crystal (LTC) growth, based on axial fiber growth followed by lateral expansion, could produce SiC boules with potentially as few as one threading screw dislocation per wafer. In this study, the lateral expansion aspect of LTC growth is addressed through analysis of lateral growth of 6H-SiC a/m-plane seed crystals by hot-wall chemical vapor deposition. Preliminary synchrotron white-beam x-ray topography (SWBXT) indicates that the as-grown boules match the polytype structure of the underlying seed and have a faceted hexagonal morphology with a strain-free surface marked by steps. SWBXT Laue diffraction patterns of transverse and axial slices of the boules reveal streaks suggesting the existence of stacking faults/polytypes, and this is confirmed by micro-Raman spectroscopy. Transmission x-ray topography of both transverse and axial slices reveals inhomogeneous strains at the seed–epilayer interface and linear features propagating from the seed along the growth direction. Micro-Raman mapping of an axial slice reveals that the seed contains high stacking disorder, while contrast extinction analysis (g·b and g·b×l) of the linear features reveals that these are mostly edge-type basal plane dislocations. Further high-resolution transmission electron microscopy investigation of the seed–homoepilayer interface also reveals nanobands of different SiC polytypes. A model for their formation mechanism is proposed. Lastly, the implication of these results for improving the LTC growth process is addressed.},

  doi          = {10.1007/s11664-015-4185-7},

  journal      = {Journal of Electronic Materials},

  number       = 4,

  volume       = 45,

  place        = {United States},

  year         = {Wed Nov 25 00:00:00 EST 2015},

  month        = {Wed Nov 25 00:00:00 EST 2015}

}

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