Effects associated with nanostructure fabrication using in situ liquid cell TEM technology
Abstract
We studied silicon, carbon, and SiCx nanostructures fabricated using liquid-phase electron-beam-induced deposition technology in transmission electron microscopy systems. Nanodots obtained from fixed electron beam irradiation followed a universal size versus beam dose trend, with precursor concentrations from pure SiCl4 to 0 % SiCl4 in CH2Cl2, and electron beamintensity ranges of two orders of magnitude, showing good controllability of the deposition. Secondary electrons contributed to the determination of the lateral sizes of the nanostructures, while the primary beam appeared to have an effect in reducing the vertical growth rate. These results can be used to generate donut-shaped nanostructures. Using a scanning electron beam, line structures with both branched and unbranched morphologies were also obtained. As a result, the liquid-phase electron-beam induced deposition technology is shown to be an effective tool for advanced nanostructured material generation.
- Authors:
-
- East China Univ. of Science and Technology, Shanghai (People's Republic of China); Chinese Academy of Science, Shanghai (People's Republic of China)
- East China Univ. of Science and Technology, Shanghai (People's Republic of China)
- Publication Date:
- Research Org.:
- Univ. of Illinois, Chicago, IL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1324961
- Grant/Contract Number:
- FG02-07ER46453; FG02-07ER46471
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Nano-Micro Letters
- Additional Journal Information:
- Journal Volume: 7; Journal Issue: 4; Journal ID: ISSN 2311-6706
- Publisher:
- Springer
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; electron-beam-induced deposition; in situ TEM; nanostrucutre; semiconductor; nanolithography
Citation Formats
Chen, Xin, Zhou, Lihui, Wang, Ping, Cao, Hongliang, Miao, Xiaoli, Wei, Feifei, and Chen, Xia. Effects associated with nanostructure fabrication using in situ liquid cell TEM technology. United States: N. p., 2015.
Web. doi:10.1007/s40820-015-0054-4.
Chen, Xin, Zhou, Lihui, Wang, Ping, Cao, Hongliang, Miao, Xiaoli, Wei, Feifei, & Chen, Xia. Effects associated with nanostructure fabrication using in situ liquid cell TEM technology. United States. https://doi.org/10.1007/s40820-015-0054-4
Chen, Xin, Zhou, Lihui, Wang, Ping, Cao, Hongliang, Miao, Xiaoli, Wei, Feifei, and Chen, Xia. Tue .
"Effects associated with nanostructure fabrication using in situ liquid cell TEM technology". United States. https://doi.org/10.1007/s40820-015-0054-4. https://www.osti.gov/servlets/purl/1324961.
@article{osti_1324961,
title = {Effects associated with nanostructure fabrication using in situ liquid cell TEM technology},
author = {Chen, Xin and Zhou, Lihui and Wang, Ping and Cao, Hongliang and Miao, Xiaoli and Wei, Feifei and Chen, Xia},
abstractNote = {We studied silicon, carbon, and SiCx nanostructures fabricated using liquid-phase electron-beam-induced deposition technology in transmission electron microscopy systems. Nanodots obtained from fixed electron beam irradiation followed a universal size versus beam dose trend, with precursor concentrations from pure SiCl4 to 0 % SiCl4 in CH2Cl2, and electron beamintensity ranges of two orders of magnitude, showing good controllability of the deposition. Secondary electrons contributed to the determination of the lateral sizes of the nanostructures, while the primary beam appeared to have an effect in reducing the vertical growth rate. These results can be used to generate donut-shaped nanostructures. Using a scanning electron beam, line structures with both branched and unbranched morphologies were also obtained. As a result, the liquid-phase electron-beam induced deposition technology is shown to be an effective tool for advanced nanostructured material generation.},
doi = {10.1007/s40820-015-0054-4},
journal = {Nano-Micro Letters},
number = 4,
volume = 7,
place = {United States},
year = {Tue Jul 28 00:00:00 EDT 2015},
month = {Tue Jul 28 00:00:00 EDT 2015}
}
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Works referencing / citing this record:
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