Breakthroughs in photonics 2013: X-ray optics

Soufli, Regina

doi:10.1109/JPHOT.2014.2309640

Title: Breakthroughs in photonics 2013: X-ray optics

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Abstract

Here, this review discusses the latest advances in extreme ultraviolet/X-ray optics development, which are motivated by the availability and demands of new X-ray sources and scientific and industrial applications. Among the breakthroughs highlighted are the following: i) fabrication, metrology, and mounting technologies for large-area optical substrates with improved figure, roughness, and focusing properties; ii) multilayer coatings with especially optimized layer properties, achieving improved reflectance, stability, and out-of-band suppression; and iii) nanodiffractive optics with improved efficiency and resolution.

Authors:

Soufli, Regina ^[1]

Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)

Publication Date:: Tue Apr 01 00:00:00 EDT 2014

Research Org.:: Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1266667

Report Number(s):: LLNL-JRNL-651182
Journal ID: ISSN 1943-0655

Grant/Contract Number:: AC52-07NA27344

Resource Type:: Accepted Manuscript

Journal Name:: IEEE Photonics Journal (Online)

Additional Journal Information:: Journal Name: IEEE Photonics Journal (Online); Journal Volume: 6; Journal Issue: 2; Journal ID: ISSN 1943-0655

Publisher:: IEEE

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE; 79 ASTRONOMY AND ASTROPHYSICS; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; x-ray optics; multilayer interference coatings; metrology; EUV; X-ray applications

Citation Formats


                    Soufli, Regina. Breakthroughs in photonics 2013: X-ray optics.  United States: N. p., 2014. 
Web.  doi:10.1109/JPHOT.2014.2309640.

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                    Soufli, Regina. Breakthroughs in photonics 2013: X-ray optics.  United States.  https://doi.org/10.1109/JPHOT.2014.2309640

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                    Soufli, Regina. Tue .  
"Breakthroughs in photonics 2013: X-ray optics".  United States.  https://doi.org/10.1109/JPHOT.2014.2309640.  https://www.osti.gov/servlets/purl/1266667.

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@article{osti_1266667,

  title        = {Breakthroughs in photonics 2013: X-ray optics},

  author       = {Soufli, Regina},

  abstractNote = {Here, this review discusses the latest advances in extreme ultraviolet/X-ray optics development, which are motivated by the availability and demands of new X-ray sources and scientific and industrial applications. Among the breakthroughs highlighted are the following: i) fabrication, metrology, and mounting technologies for large-area optical substrates with improved figure, roughness, and focusing properties; ii) multilayer coatings with especially optimized layer properties, achieving improved reflectance, stability, and out-of-band suppression; and iii) nanodiffractive optics with improved efficiency and resolution.},

  doi          = {10.1109/JPHOT.2014.2309640},

  journal      = {IEEE Photonics Journal (Online)},

  number       = 2,

  volume       = 6,

  place        = {United States},

  year         = {Tue Apr 01 00:00:00 EDT 2014},

  month        = {Tue Apr 01 00:00:00 EDT 2014}

}

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