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This content will become publicly available on July 18, 2017

Title: Analysis of non-equilibrium phenomena in inductively coupled plasma generators

Authors:
 [1] ;  [2] ;  [1]
  1. University of Illinois at Urbana-Champaign, Urbana, Illinois 61822, USA
  2. Von Karman Institute for Fluid Dynamics, Rhode-Saint-Genèse, Belgium
Publication Date:
OSTI Identifier:
1263713
Grant/Contract Number:
NA0002374
Type:
Publisher's Accepted Manuscript
Journal Name:
Physics of Plasmas
Additional Journal Information:
Journal Volume: 23; Journal Issue: 7; Related Information: CHORUS Timestamp: 2016-07-18 13:37:52; Journal ID: ISSN 1070-664X
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English