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Title: Nuclear reaction analysis for H, Li, Be, B, C, N, O and F with an RBS check

In this paper, 15N nuclear reaction analysis (NRA) for H is combined with 1.2 MeV deuteron (D) NRA which provides a simultaneous analysis for Li, Be, B, C, N, O and F. The energy dependence of the D NRA has been measured and used to correct for the D energy loss in film being analyzed. A 2 MeV He RBS measurement is made. Film composition is determined by a self-consistent analysis of the light element NRA data combined with an RBS analysis for heavy elements. This composition is used to simulate, with no adjustable parameters, the complete RBS spectrum. Finally, comparison of this simulated RBS spectrum with the measured spectrum provides a powerful check of the analysis.
Authors:
 [1] ;  [1] ;  [2] ;  [2] ;  [2] ;  [3] ;  [3] ;  [3] ;  [4] ;  [4] ;  [4] ;  [5] ;  [5] ;  [6] ;  [6] ;  [7] ;  [7] ;  [7]
  1. Univ. at Albany, SUNY, NY (United States). Physics Dept.
  2. Univ. of Missouri-Kansas City, MO (United States). Dept. of Physics and Astronomy
  3. Univ. of Helsinki (Finland). Dept. of Chemistry
  4. Univ. of Oslo (Norway). Dept. of Chemistry
  5. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Solid State Division
  6. Univ. of Texas, Austin, TX (United States). Dept. of Electrical and Computer Engineering
  7. Intel Corporation, Hillsboro, OR (United States). Logic Technology Development
Publication Date:
OSTI Identifier:
1261264
Grant/Contract Number:
AC05-00OR22725
Type:
Accepted Manuscript
Journal Name:
Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
Additional Journal Information:
Journal Volume: 371; Journal ID: ISSN 0168-583X
Publisher:
Elsevier
Research Org:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
73 NUCLEAR PHYSICS AND RADIATION PHYSICS; 38 RADIATION CHEMISTRY, RADIOCHEMISTRY, AND NUCLEAR CHEMISTRY NRA; Light elements; Electronic materials