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This content will become publicly available on June 13, 2017

Title: Analysis of compositional uniformity in AlxGa1−xN thin films using atom probe tomography and electron microscopy

Authors:
 [1] ;  [1] ;  [1] ;  [1] ;  [2]
  1. Department of Materials Science and Engineering, Carnegie Mellon University, 5000 Forbes Ave., Pittsburgh, Pennsylvania 15213
  2. Energy and Environment Directorate, Pacific Northwest National Laboratory, P.O. Box 999, Richland, Washington 99352
Publication Date:
OSTI Identifier:
1256776
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Additional Journal Information:
Journal Volume: 34; Journal Issue: 4; Related Information: CHORUS Timestamp: 2016-06-13 16:10:43; Journal ID: ISSN 0734-2101
Publisher:
American Vacuum Society
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English