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This content will become publicly available on May 24, 2017

Title: Aperture alignment in autocollimator-based deflectometric profilometers

Authors:
 [1] ;  [2] ;  [2] ;  [1] ;  [2] ;  [1] ;  [3] ;  [2]
  1. Physikalisch-Technische Bundesanstalt, Bundesallee 100, 38116 Braunschweig, Germany
  2. Advanced Light Source, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA
  3. Engineering Division, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA
Publication Date:
OSTI Identifier:
1254335
Grant/Contract Number:
AC02-05CH11231
Type:
Publisher's Accepted Manuscript
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 87; Journal Issue: 5; Related Information: CHORUS Timestamp: 2016-05-24 22:45:01; Journal ID: ISSN 0034-6748
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English