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Title: Linear chirped slope profile for spatial calibration in slope measuring deflectometry

Authors:
 [1] ;  [1] ;  [2] ;  [2] ;  [3]
  1. Helmholtz Zentrum Berlin für Materialien und Energie, Institut für Nanometer Optik und Technologie, Albert-Einstein-Str. 15, 12489 Berlin, Germany
  2. Leibnitz Institut für Oberflächen Modifizierung Leipzig e.V., IOM, Permoserstr. 15, 04318 Leipzig, Germany
  3. Lawerence Berkeley National Laboratory, Advanced Light Source, 1 Cyclotron Road, Berkeley, California 94720, USA
Publication Date:
OSTI Identifier:
1254334
Grant/Contract Number:
AC02-05CH11231
Type:
Published Article
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 87; Journal Issue: 5; Related Information: CHORUS Timestamp: 2016-05-24 22:31:33; Journal ID: ISSN 0034-6748
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English