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Title: Nanoscale temperature mapping in operating microelectronic devices

Abstract

We report that modern microelectronic devices have nanoscale features that dissipate power nonuniformly, but fundamental physical limits frustrate efforts to detect the resulting temperature gradients. Contact thermometers disturb the temperature of a small system, while radiation thermometers struggle to beat the diffraction limit. Exploiting the same physics as Fahrenheit’s glass-bulb thermometer, we mapped the thermal expansion of Joule-heated, 80-nanometer-thick aluminum wires by precisely measuring changes in density. With a scanning transmission electron microscope (STEM) and electron energy loss spectroscopy (EELS), we quantified the local density via the energy of aluminum’s bulk plasmon. Rescaling density to temperature yields maps with a statistical precision of 3 kelvin/hertz₋1/2, an accuracy of 10%, and nanometer-scale resolution. Lastly, many common metals and semiconductors have sufficiently sharp plasmon resonances to serve as their own thermometers.

Authors:
 [1];  [2];  [2];  [3];  [3];  [4];  [2]
+ Show Author Affiliations
  1. Univ. of Southern California, Los Angeles, CA (United States). Center for Electron Microscopy and Microanalysis
  2. Univ. of California, Los Angeles, CA (United States)
  3. Univ. of Southern California, Los Angeles, CA (United States). Dept. of Electrical Engineering
  4. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Publication Date:
Research Org.:
Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
OSTI Identifier:
1253993
Grant/Contract Number:  
DMR-1206849; AC02-05CH11231
Resource Type:
Accepted Manuscript
Journal Name:
Science
Additional Journal Information:
Journal Volume: 347; Journal Issue: 6222; Journal ID: ISSN 0036-8075
Publisher:
AAAS
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Mecklenburg, Matthew, Hubbard, William A., White, E. R., Dhall, Rohan, Cronin, Stephen B., Aloni, Shaul, and Regan, B. C. Nanoscale temperature mapping in operating microelectronic devices. United States: N. p., 2015. Web. doi:10.1126/science.aaa2433.
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Mecklenburg, Matthew, Hubbard, William A., White, E. R., Dhall, Rohan, Cronin, Stephen B., Aloni, Shaul, & Regan, B. C. Nanoscale temperature mapping in operating microelectronic devices. United States. https://doi.org/10.1126/science.aaa2433
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Mecklenburg, Matthew, Hubbard, William A., White, E. R., Dhall, Rohan, Cronin, Stephen B., Aloni, Shaul, and Regan, B. C. Thu . "Nanoscale temperature mapping in operating microelectronic devices". United States. https://doi.org/10.1126/science.aaa2433. https://www.osti.gov/servlets/purl/1253993.
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@article{osti_1253993,
title = {Nanoscale temperature mapping in operating microelectronic devices},
author = {Mecklenburg, Matthew and Hubbard, William A. and White, E. R. and Dhall, Rohan and Cronin, Stephen B. and Aloni, Shaul and Regan, B. C.},
abstractNote = {We report that modern microelectronic devices have nanoscale features that dissipate power nonuniformly, but fundamental physical limits frustrate efforts to detect the resulting temperature gradients. Contact thermometers disturb the temperature of a small system, while radiation thermometers struggle to beat the diffraction limit. Exploiting the same physics as Fahrenheit’s glass-bulb thermometer, we mapped the thermal expansion of Joule-heated, 80-nanometer-thick aluminum wires by precisely measuring changes in density. With a scanning transmission electron microscope (STEM) and electron energy loss spectroscopy (EELS), we quantified the local density via the energy of aluminum’s bulk plasmon. Rescaling density to temperature yields maps with a statistical precision of 3 kelvin/hertz₋1/2, an accuracy of 10%, and nanometer-scale resolution. Lastly, many common metals and semiconductors have sufficiently sharp plasmon resonances to serve as their own thermometers.},
doi = {10.1126/science.aaa2433},
journal = {Science},
number = 6222,
volume = 347,
place = {United States},
year = {Thu Feb 05 00:00:00 EST 2015},
month = {Thu Feb 05 00:00:00 EST 2015}
}
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https://doi.org/10.1126/science.aaa2433
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