Optimizing phosphorus diffusion for photovoltaic applications: Peak doping, inactive phosphorus, gettering, and contact formation

Wagner, Hannes; Dastgheib-Shirazi, Amir; Min, Byungsul; Morishige, Ashley E.; Steyer, Michael; Hahn, Giso; del Cañizo, Carlos; Buonassisi, Tonio; Altermatt, Pietro P.

doi:10.1063/1.4949326

Title: Optimizing phosphorus diffusion for photovoltaic applications: Peak doping, inactive phosphorus, gettering, and contact formation

Authors:

Wagner, Hannes ^[1];

^[2]; Min, Byungsul ^[3];

^[1]; Steyer, Michael ^[2]; Hahn, Giso ^[2];

^[4]; Buonassisi, Tonio ^[1]; Altermatt, Pietro P. ^[5]

Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA
Department of Physics, University of Konstanz, 78457 Konstanz, Germany
Institute for Solar Energy Research Hamelin (ISFH), 31860 Emmerthal, Germany
Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA, Instituto de Energía Solar, Universidad Politécnica de Madrid, 28040 Madrid, Spain
Department of Solar Energy, Institute of Solid-State Physics, University of Hannover, 30167 Hannover, Germany

Publication Date:: Fri May 13 00:00:00 EDT 2016

Sponsoring Org.:: USDOE

OSTI Identifier:: 1253075

Grant/Contract Number:: EE0006335

Resource Type:: Publisher's Accepted Manuscript

Journal Name:: Journal of Applied Physics

Additional Journal Information:: Journal Name: Journal of Applied Physics Journal Volume: 119 Journal Issue: 18; Journal ID: ISSN 0021-8979

Publisher:: American Institute of Physics

Country of Publication:: United States

Language:: English

Citation Formats


                    Wagner, Hannes, Dastgheib-Shirazi, Amir, Min, Byungsul, Morishige, Ashley E., Steyer, Michael, Hahn, Giso, del Cañizo, Carlos, Buonassisi, Tonio, and Altermatt, Pietro P. Optimizing phosphorus diffusion for photovoltaic applications: Peak doping, inactive phosphorus, gettering, and contact formation.  United States: N. p., 2016. 
Web.  doi:10.1063/1.4949326.

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                    Wagner, Hannes, Dastgheib-Shirazi, Amir, Min, Byungsul, Morishige, Ashley E., Steyer, Michael, Hahn, Giso, del Cañizo, Carlos, Buonassisi, Tonio, & Altermatt, Pietro P. Optimizing phosphorus diffusion for photovoltaic applications: Peak doping, inactive phosphorus, gettering, and contact formation.  United States.  https://doi.org/10.1063/1.4949326

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                    Wagner, Hannes, Dastgheib-Shirazi, Amir, Min, Byungsul, Morishige, Ashley E., Steyer, Michael, Hahn, Giso, del Cañizo, Carlos, Buonassisi, Tonio, and Altermatt, Pietro P. Fri .  
"Optimizing phosphorus diffusion for photovoltaic applications: Peak doping, inactive phosphorus, gettering, and contact formation".  United States.  https://doi.org/10.1063/1.4949326.

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@article{osti_1253075,

  title        = {Optimizing phosphorus diffusion for photovoltaic applications: Peak doping, inactive phosphorus, gettering, and contact formation},

  author       = {Wagner, Hannes and Dastgheib-Shirazi, Amir and Min, Byungsul and Morishige, Ashley E. and Steyer, Michael and Hahn, Giso and del Cañizo, Carlos and Buonassisi, Tonio and Altermatt, Pietro P.},

  abstractNote = {},

  doi          = {10.1063/1.4949326},

  journal      = {Journal of Applied Physics},

  number       = 18,

  volume       = 119,

  place        = {United States},

  year         = {Fri May 13 00:00:00 EDT 2016},

  month        = {Fri May 13 00:00:00 EDT 2016}

}

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Title: Optimizing phosphorus diffusion for photovoltaic applications: Peak doping, inactive phosphorus, gettering, and contact formation

Citation Formats

Relationships between Diffusion Parameters and Phosphorus Precipitation during the POCl3 Diffusion Process journal, January 2013

Effect of Boron Codoping and Phosphorus Concentration on Phosphorus Diffusion Gettering journal, January 2014

Segregation and transport coefficients of impurities at the Si/SiO 2 interface journal, February 1987

Phosphorus diffusion processes in SiO2 films journal, February 1975

A model for phosphosilicate glass deposition via POCl 3 for control of phosphorus dose in Si journal, December 2012

A unified mobility model for device simulation—II. Temperature dependence of carrier mobility and lifetime journal, July 1992

Current Transport Through Lead–Borosilicate Interfacial Glass Layers at the Screen–Printed Silver-Silicon Front Contact journal, July 2015

The effects of phosphorus precipitation on the open-circuit voltage in N+/P silicon solar cells journal, February 1984

Dopant and carrier concentration in Si in equilibrium with monoclinic SiP precipitates journal, March 1996

Incomplete ionization of aluminum in silicon and its effect on accurate determination of doping profiles journal, November 2013

Precipitated iron: A limit on gettering efficacy in multicrystalline silicon journal, January 2013

Kinetics of Phosphorus Predeposition in Silicon Using POCl[sub 3] journal, January 1975

Modeling of the Kinetics of Dopant Precipitation in Silicon journal, January 1995

Characterization of the PSG/Si interface of H3PO4 doping process for solar cells journal, November 2011

The Potential Advantage of Industrially Processed Boron Emitters Compared to Phosphorus Emitters journal, January 2014

Darwin at High Temperature: Advancing Solar Cell Material Design Using Defect Kinetics Simulations and Evolutionary Optimization journal, May 2014

Gettering in silicon journal, April 1989

Comparison of the thermal stability of single Al2O3 layers and Al2O3/SiNx stacks for the surface passiviation of silicon journal, January 2011

Diffusion of Boron, Phosphorus, Arsenic, and Antimony in Thermally Grown Silicon Dioxide journal, January 1999

Modeling phosphorus diffusion gettering of iron in single crystal silicon journal, January 2009

Development of Screen-Printed Silicon Solar Cells With High Fill Factors on 100<tex>$Omega$</tex>/sq Emitters journal, June 2004

Gettering of transition metal impurities during phosphorus emitter diffusion in multicrystalline silicon solar cell processing journal, May 2006

Numerical modeling of highly doped Si:P emitters based on Fermi–Dirac statistics and self-consistent material parameters journal, September 2002

Heavily doped Si:P emitters of crystalline Si solar cells: recombination due to phosphorus precipitation: Heavily doped Si:P emitters of crystalline Si solar cells: recombination due to phosphorus precipitation journal, June 2014

Electron microscopy study of front-side Ag contact in crystalline Si solar cells journal, March 2009

Evaluation of possible mechanisms behind P gettering of iron journal, July 2011

Impact of excess phosphorus doping and Si crystalline defects on Ag crystallite nucleation and growth in silver screen-printed Si solar cells: Impact of emitter and crystal defects on Si solar cell Ag metallization journal, December 2013

Phosphosilicate glass stabilization of FET devices journal, January 1969

Study of Internal versus External Gettering of Iron during Slow Cooling Processes for Silicon Solar Cell Fabrication journal, October 2009

Building intuition of iron evolution during solar cell processing through analysis of different process models journal, July 2015

Synchrotron-based analysis of chromium distributions in multicrystalline silicon for solar cells journal, May 2015

Combined Impact of Heterogeneous Lifetime and Gettering on Solar Cell Performance journal, August 2015

Models for numerical device simulations of crystalline silicon solar cells—a review journal, July 2011

Influence of laser power on the properties of laser doped solar cells journal, April 2011

19.8% efficient “honeycomb” textured multicrystalline and 24.4% monocrystalline silicon solar cells journal, October 1998

Low temperature diffusivity and precipitation of phosphorus in silicon journal, January 1984

Metallic Impurities in Mono and Multi-crystalline Silicon and Their Gettering by Phosphorus Diffusion conference, January 2008

Grain Boundary Segregation in Silicon Heavily Doped with Phosphorus and Arsenic journal, October 1982

A unified mobility model for device simulation—I. Model equations and concentration dependence journal, July 1992

HREM of SiP precipitates at the (111) silicon surface during phosphorus predeposition journal, January 1984

High concentration in-diffusion of phosphorus in Si from a spray-on source journal, March 2006

Characteristics of silicon solar cell emitter with a reduced diffused phosphorus inactive layer journal, October 2013

Silver thick-film contacts on highly doped n-type silicon emitters: Structural and electronic properties of the interface journal, March 2003

Main defect reactions behind phosphorus diffusion gettering of iron journal, December 2014

18.9% efficient full area laser doped silicon solar cell journal, September 2009

Silicon solar-cell processing for minimizing the influence of impurities and defects journal, October 2002

High-Efficiency Silicon Solar Cells With Boron Local Back Surface Fields Formed by Laser Chemical Processing journal, September 2011

Impurity-to-efficiency simulator: predictive simulation of silicon solar cell performance based on iron content and distribution journal, November 2010

Precipitation as the phenomenon responsible for the electrically inactive phosphorus in silicon journal, March 1982

Limitation of Industrial Phosphorus-diffused Emitters by SRH Recombination journal, January 2014

Iron distribution in silicon after solar cell processing: Synchrotron analysis and predictive modeling journal, April 2011

Impact of screen printing silver paste components on the space charge region recombination losses of industrial silicon solar cells journal, November 2012

Sorting Metrics for Customized Phosphorus Diffusion Gettering journal, November 2014

Physical understanding of printed thick-film front contacts of crystalline Si solar cells—Review of existing models and recent developments journal, November 2006

Improved phosphorous gettering of multicrystalline silicon journal, May 2006

22.8% efficient silicon solar cell journal, September 1989

Relationships between Diffusion Parameters and Phosphorus Precipitation during the POCl3 Diffusion Process
journal, January 2013

Effect of Boron Codoping and Phosphorus Concentration on Phosphorus Diffusion Gettering
journal, January 2014

Segregation and transport coefficients of impurities at the Si/SiO ₂ interface
journal, February 1987

Phosphorus diffusion processes in SiO2 films
journal, February 1975

A model for phosphosilicate glass deposition via POCl ₃ for control of phosphorus dose in Si
journal, December 2012

A unified mobility model for device simulation—II. Temperature dependence of carrier mobility and lifetime
journal, July 1992

Current Transport Through Lead–Borosilicate Interfacial Glass Layers at the Screen–Printed Silver-Silicon Front Contact
journal, July 2015

The effects of phosphorus precipitation on the open-circuit voltage in N+/P silicon solar cells
journal, February 1984

Dopant and carrier concentration in Si in equilibrium with monoclinic SiP precipitates
journal, March 1996

Incomplete ionization of aluminum in silicon and its effect on accurate determination of doping profiles
journal, November 2013

Precipitated iron: A limit on gettering efficacy in multicrystalline silicon
journal, January 2013

Kinetics of Phosphorus Predeposition in Silicon Using POCl[sub 3]
journal, January 1975

Modeling of the Kinetics of Dopant Precipitation in Silicon
journal, January 1995

Characterization of the PSG/Si interface of H3PO4 doping process for solar cells
journal, November 2011

The Potential Advantage of Industrially Processed Boron Emitters Compared to Phosphorus Emitters
journal, January 2014

Darwin at High Temperature: Advancing Solar Cell Material Design Using Defect Kinetics Simulations and Evolutionary Optimization
journal, May 2014

Gettering in silicon
journal, April 1989

Comparison of the thermal stability of single Al2O3 layers and Al2O3/SiNx stacks for the surface passiviation of silicon
journal, January 2011

Diffusion of Boron, Phosphorus, Arsenic, and Antimony in Thermally Grown Silicon Dioxide
journal, January 1999

Modeling phosphorus diffusion gettering of iron in single crystal silicon
journal, January 2009

Development of Screen-Printed Silicon Solar Cells With High Fill Factors on 100<tex>$Omega$</tex>/sq Emitters
journal, June 2004

Gettering of transition metal impurities during phosphorus emitter diffusion in multicrystalline silicon solar cell processing
journal, May 2006

Numerical modeling of highly doped Si:P emitters based on Fermi–Dirac statistics and self-consistent material parameters
journal, September 2002

Heavily doped Si:P emitters of crystalline Si solar cells: recombination due to phosphorus precipitation: Heavily doped Si:P emitters of crystalline Si solar cells: recombination due to phosphorus precipitation
journal, June 2014

Electron microscopy study of front-side Ag contact in crystalline Si solar cells
journal, March 2009

Evaluation of possible mechanisms behind P gettering of iron
journal, July 2011

Impact of excess phosphorus doping and Si crystalline defects on Ag crystallite nucleation and growth in silver screen-printed Si solar cells: Impact of emitter and crystal defects on Si solar cell Ag metallization
journal, December 2013

Phosphosilicate glass stabilization of FET devices
journal, January 1969

Study of Internal versus External Gettering of Iron during Slow Cooling Processes for Silicon Solar Cell Fabrication
journal, October 2009

Building intuition of iron evolution during solar cell processing through analysis of different process models
journal, July 2015

Synchrotron-based analysis of chromium distributions in multicrystalline silicon for solar cells
journal, May 2015

Combined Impact of Heterogeneous Lifetime and Gettering on Solar Cell Performance
journal, August 2015

Models for numerical device simulations of crystalline silicon solar cells—a review
journal, July 2011

Influence of laser power on the properties of laser doped solar cells
journal, April 2011

19.8% efficient “honeycomb” textured multicrystalline and 24.4% monocrystalline silicon solar cells
journal, October 1998

Low temperature diffusivity and precipitation of phosphorus in silicon
journal, January 1984

Metallic Impurities in Mono and Multi-crystalline Silicon and Their Gettering by Phosphorus Diffusion
conference, January 2008

Grain Boundary Segregation in Silicon Heavily Doped with Phosphorus and Arsenic
journal, October 1982

A unified mobility model for device simulation—I. Model equations and concentration dependence
journal, July 1992

HREM of SiP precipitates at the (111) silicon surface during phosphorus predeposition
journal, January 1984

High concentration in-diffusion of phosphorus in Si from a spray-on source
journal, March 2006

Characteristics of silicon solar cell emitter with a reduced diffused phosphorus inactive layer
journal, October 2013

Silver thick-film contacts on highly doped n-type silicon emitters: Structural and electronic properties of the interface
journal, March 2003

Main defect reactions behind phosphorus diffusion gettering of iron
journal, December 2014

18.9% efficient full area laser doped silicon solar cell
journal, September 2009

Silicon solar-cell processing for minimizing the influence of impurities and defects
journal, October 2002

High-Efficiency Silicon Solar Cells With Boron Local Back Surface Fields Formed by Laser Chemical Processing
journal, September 2011

Impurity-to-efficiency simulator: predictive simulation of silicon solar cell performance based on iron content and distribution
journal, November 2010

Precipitation as the phenomenon responsible for the electrically inactive phosphorus in silicon
journal, March 1982

Limitation of Industrial Phosphorus-diffused Emitters by SRH Recombination
journal, January 2014

Iron distribution in silicon after solar cell processing: Synchrotron analysis and predictive modeling
journal, April 2011

Impact of screen printing silver paste components on the space charge region recombination losses of industrial silicon solar cells
journal, November 2012

Sorting Metrics for Customized Phosphorus Diffusion Gettering
journal, November 2014

Physical understanding of printed thick-film front contacts of crystalline Si solar cells—Review of existing models and recent developments
journal, November 2006

Improved phosphorous gettering of multicrystalline silicon
journal, May 2006

22.8% efficient silicon solar cell
journal, September 1989