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Title: Silicon nanomembranes as a means to evaluate stress evolution in deposited thin films

Authors:
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Publication Date:
OSTI Identifier:
1250230
Grant/Contract Number:
FG02-03ER46028
Type:
Published Article
Journal Name:
Extreme Mechanics Letters
Additional Journal Information:
Journal Volume: 1; Journal Issue: C; Journal ID: ISSN 2352-4316
Publisher:
Elsevier
Sponsoring Org:
USDOE
Country of Publication:
Netherlands
Language:
English